Large thermal tuning of a polymer-embedded silicon nitride nanobeam cavity

Chen Yueyang; Whitehead James; Ryou Albert; Zheng Jiajiu; Xu Peipeng; Fryett Taylor; Majumdar Arka

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Large thermal tuning of a polymer-embedded silicon nitride nanobeam cavity

机译：大型热调的聚合物嵌入式氮化硅纳米孔腔

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Tunable silicon nitride nanophotonic resonators are a critical building block for integrated photonic systems in the visible wavelength range. We experimentally demonstrate a thermally tunable polymer-embedded silicon nitride nanobeam cavity with a tuning efficiency of 44 pm/degrees C and 0.13 tun/mW in the near-visible wavelength range. The large tuning efficiency comes from the high thereto-optic coefficient of the SU-8 polymer and the "air-mode" cavity design, where a large portion of the cavity field is confined inside the polymer region. The demonstrated resonator will enable locally tunable cavity quantum electrodynamic experiments in the silicon nitride platform. (C) 2019 Optical Society of America

机译：可调谐氮化硅纳米光电谐振器是用于在可见波长范围内的集成光子系统的关键构建块。我们通过在近似可见波长范围内，通过实验地示出了热调谐聚合物嵌入的氮化硅纳米氮纳米腔腔，其调节效率为44μm/℃和0.13支撑的0.13个/ mw。大的调谐效率来自SU-8聚合物的高 - 光学系数和“空气模式”腔设计，其中大部分腔场被限制在聚合物区域内。所示的谐振器将在氮化硅平台中实现局部可调腔电流电动实验。（c）2019年光学学会

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来源
《Optics Letters》 |2019年第12期|共4页
作者
Chen Yueyang; Whitehead James; Ryou Albert; Zheng Jiajiu; Xu Peipeng; Fryett Taylor; Majumdar Arka;
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Univ Washington Elect &

Comp Engn Seattle WA 98195 USA;

Univ Washington Elect &

Comp Engn Seattle WA 98195 USA;

Univ Washington Elect &

Comp Engn Seattle WA 98195 USA;

Univ Washington Elect &

Comp Engn Seattle WA 98195 USA;

Univ Washington Elect &

Comp Engn Seattle WA 98195 USA;

Univ Washington Elect &

Comp Engn Seattle WA 98195 USA;

Univ Washington Elect &

Comp Engn Seattle WA 98195 USA;

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正文语种 eng
中图分类计量学;光学;
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专利

1. Large thermal tuning of a polymer-embedded silicon nitride nanobeam cavity [J] . Chen Yueyang, Whitehead James, Ryou Albert, Optics Letters . 2019,第12期

机译：大型热调的聚合物嵌入式氮化硅纳米孔腔
2. Silicon Nitride Bragg Grating With Joule Thermal Tuning for External Cavity Lasers [J] . Primiani Peppino, Boust Sylvain, Fedeli Jean-Marc, IEEE Photonics Technology Letters . 2019,第12期

机译：具有焦耳热调谐功能的氮化硅布拉格光栅，用于外腔激光器
3. Silicon Nitride Bragg Grating With Joule Thermal Tuning for External Cavity Lasers [J] . Primiani Peppino, Boust Sylvain, Fedeli Jean-Marc, IEEE Photonics Technology Letters . 2019,第12期

机译：硅氮化硅Bragg光栅与焦耳热调外腔激光器
4. Large Thermal Tuning of Polymer-Embedded Silicon Nitride Nanobeam Cavity [C] . Yueyang Chen, James Whitehead, Albert Ryou, Conference on Lasers and Electro-Optics . 2020

机译：聚合物嵌入氮化硅纳米束腔的大热调谐
5. Thermal oxidation-induced strain in silicon nanobeams. [D] . Pyzyna, Adam Michael. 2005

机译：硅纳米束中的热氧化诱导应变。
6. A quantum optical study of thresholdless lasing features in high-β nitride nanobeam cavities [O] . Stefan T. Jagsch, Noelia Vico Triviño, Frederik Lohof, -1

机译：高β氮化物纳米束腔中无阈值激光特征的量子光学研究
7. High-Q nanobeam cavities on a silicon nitride platform enabled by slow light [O] . Jiahao Zhan, Zeinab Jafari, Sylvain Veilleux, 2020

机译：通过慢光实现硅氮化硅平台上的高Q纳米腔
8. Observation of Transparency of Erbium-doped Silicon Nitride in Photonic Crystal Nanobeam Cavities [R] . Gong, Y., Makarova, M., Yerci, S., 2010

机译：光子晶体纳米波腔中掺铒氮化硅透明度的观察

Large thermal tuning of a polymer-embedded silicon nitride nanobeam cavity

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