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首页> 外文期刊>Biosensors & Bioelectronics: The International Journal for the Professional Involved with Research, Technology and Applications of Biosensers and Related Devices >A CMOS neuroelectronic interface based on two-dimensional transistor arrays with monolithically-integrated circuitry
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A CMOS neuroelectronic interface based on two-dimensional transistor arrays with monolithically-integrated circuitry

机译：基于带有单片集成电路的二维晶体管阵列的CMOS神经电子接口

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The ability to monitor and to elicit neural activity with a high spatiotemporal resolution has grown essential for studying the functionality of neuronal networks. Although a variety of microelectrode arrays (MEAs) has been proposed, very few MEAs are integrated with signal-processing circuitry. As a result, the maximum number of electrodes is limited by routing complexity, and the signal-to-noise ratio is degraded by parasitics and noise interference. This paper presents a single-chip neuroelectronic interface integrating oxide-semiconductor field-effect transistors (OSFETs) with signal-processing circuitry. After the chip was fabricated with the standard complementary-metal-oxide-semiconductor (CMOS) process, polygates of specific transistors were etched at die-level to form OSFETs, while metal layers were retained to connect the OSFETs into two-dimensional arrays. The complete removal of polygates was confirmed by high-resolution image scanners, and the reliability of OSFETs was examined by measuring their electrical characteristics. Through a gate oxide of only 7 nm thick, each OSFET can record and stimulate neural activity extracellularly by capacitive coupling. The capability of the full chip in neural recording and stimulation was further experimented using the well-characterised escape circuit of the crayfish. Experimental results indicate that the OSFET-based neuroelectronic interface can be used to study neuronal networks as faithfully as conventional electrophysiological tools. Moreover, the proposed simple, die-level fabrication process of the OSFETs underpins the development of various field-effect biosensors on a large scale with on-chip circuitry.
机译：以高时空分辨率监视和引发神经活动的能力对于研究神经元网络的功能已变得至关重要。尽管已经提出了多种微电极阵列（MEA），但是很少有MEA与信号处理电路集成在一起。结果，电极的最大数量受到布线复杂度的限制，并且信噪比由于寄生和噪声干扰而降低。本文提出了一种集成了氧化物半导体场效应晶体管（OSFET）和信号处理电路的单芯片神经电子接口。用标准的互补金属氧化物半导体（CMOS）工艺制造芯片后，在管芯级蚀刻特定晶体管的多晶硅栅以形成OSFET，同时保留金属层以将OSFET连接成二维阵列。高分辨率图像扫描仪确认了多晶硅栅的完全去除，并通过测量其电学特性检查了OSFET的可靠性。通过仅7 nm厚的栅极氧化物，每个OSFET都可以通过电容耦合在细胞外记录和刺激神经活动。全功能芯片在神经记录和刺激方面的能力使用小龙虾的逃逸电路进行了进一步的实验。实验结果表明，基于OSFET的神经电子接口可以像传统的电生理工具一样忠实地研究神经网络。此外，所提出的简单，裸片级的OSFET制造工艺为大规模的具有片上电路的场效应生物传感器的发展奠定了基础。

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