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Asymmetric surface effect on the configuration of bilayer Si/SiGe nanosprings

机译:对双层Si / SiGe NanoSprings的配置的不对称表面效应

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摘要

This study investigates the asymmetric surface effect on nanosprings composed of Si/SiGe bilayer thin films. The misfit strain between Si and SiGe layers is known to be the driving force whereby the deformation into the nanospring shape occurs. The crystalline orientation and width-to-thickness ratio are the main factors that determine the deformed equilibrium configuration. In addition, as the thickness decreases to dozens of nanometers or less, the effect of the surface on the equilibrium configuration of the thin film is magnified. The diamond cubic crystal structure, unlike the face-centered or body-centered cubic structures, has asymmetric surface properties. Owing to the asymmetry, Si/SiGe bilayers with odd numbers of atomic layers have different surface configurations than those with even numbers of atomic layers. Finite element analysis with the surface effect has been performed to investigate the surface effect on the equilibrium configuration. It is observed that both size and surface configuration affect the equilibrium configuration of bilayer Si/SiGe nanosprings. An unexpected spring shape was observed when the film aligned in the < 100 > direction, which is unlikely if the surface effect is neglected.
机译:本研究研究了由Si / SiGe双层薄膜组成的纳米腔的不对称表面效应。已知Si和SiGe层之间的错配应变是驱动力,由此发生变形成纳米型形状。结晶取向和宽厚比率是确定变形的平衡构型的主要因素。另外,随着厚度减小到几十纳米或更小,表面对薄膜的平衡构型的影响放大。与面为中心或以体为中心的立方体结构不同的金刚石立方晶结构具有不对称的表面性质。由于不对称,具有奇数原子层的Si / SiGe双层具有比具有偶数原子层的表面配置不同。已经进行了表面效应的有限元分析,以研究对平衡构型的表面影响。观察到,尺寸和表面配置都会影响双层Si / SiGe纳米环的平衡配置。当在<100>方向上对准时,观察到意外的弹簧形状,如果忽略表面效果,这不太可能。

著录项

  • 来源
    《RSC Advances》 |2015年第117期|共5页
  • 作者单位

    Seoul Natl Univ Sch Mech &

    Aerosp Engn Div WCU Multiscale Mech Design Seoul 151744 South Korea;

    Seoul Natl Univ Sch Mech &

    Aerosp Engn Div WCU Multiscale Mech Design Seoul 151744 South Korea;

    Seoul Natl Univ Sch Mech &

    Aerosp Engn Div WCU Multiscale Mech Design Seoul 151744 South Korea;

    Seoul Natl Univ Sch Mech &

    Aerosp Engn Div WCU Multiscale Mech Design Seoul 151744 South Korea;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

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