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首页> 外文期刊>Acta Mechanica >Size-dependent dynamic modeling and vibration analysis of MEMS/NEMS-based nanomechanical beam based on the nonlocal elasticity theory
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Size-dependent dynamic modeling and vibration analysis of MEMS/NEMS-based nanomechanical beam based on the nonlocal elasticity theory

机译：基于非局部弹性理论的基于MEMS / NEMS的纳米机械梁的尺寸相关动力学建模和振动分析

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Accurate modeling and analysis of micro-anoelectromechanical systems (MEMS/NEMS) has an immense contribution in identification and improvement of the performance of such systems. This article investigates a nonclassical formulation for dynamicmodeling and vibration analysis of a piezo-actuatedmicrocantilever considering the Euler-Bernoulli beam model. Regarding the size effects in micro- to nanoscales, the size-dependent nonlocal continuum theory is employed to derive dynamic equations of the nonclassical microbeam taking into account the beam discontinuities. The nonlocal formulation of the beam and piezoelectric actuator is taken into consideration. Furthermore, the size effects on the resonant vibration characteristics of the beam are studied and some results are obtained. The results illustrate the size-dependent behavior of the beam particularly at higher resonant modes of vibrations. Also, it is indicated that the nonlocality and piezoelectric characteristics have a significant influence on the resonance behavior of the beam. However, this effect is more significant at higher resonant modes of vibrations.
机译：微/纳米机电系统（MEMS / NEMS）的准确建模和分析在识别和改善此类系统的性能方面做出了巨大贡献。本文研究了考虑欧拉-伯努利梁模型的压电致动微悬臂梁的动力学建模和振动分析的非经典公式。关于微米到纳米尺度的尺寸效应，考虑到光束的不连续性，采用尺寸依赖的非局部连续理论来推导非经典微光束的动力学方程。考虑梁和压电致动器的非局部公式。此外，研究了尺寸对梁共振振动特性的影响，并获得了一些结果。结果说明了梁的尺寸依赖性行为，特别是在较高的共振模式下。另外，还表明，非局部性和压电特性对束的共振行为具有显着影响。但是，这种效果在较高的共振模式下更为明显。

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