...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Microsystem technologies >Design of a novel lower-noise tunneling magnetoresistance micromachined gyroscope
【24h】

Design of a novel lower-noise tunneling magnetoresistance micromachined gyroscope

机译：一种新型低噪声隧道磁阻微机械陀螺仪的设计

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The core technology behind micromachined gyroscopes is the detection of the weak Coriolis force, the noise level of which by conventional methods has reached its limit. In this paper, an in-plane gyroscope structure based on the tunneling magnetoresistance (TMR) effect is designed providing a means to detect this force in the MEMS vibratory gyroscope. TMR is used so that a high sensitivity is achieved. From a theoretical analysis of the designed gyroscope structure, the structural sensitivity of the detection Coriolis force is obtained. A permanent magnet was designed and simulated for the TMR device and a magnet sensitivity was obtained. To obtain the magnetoresistance sensitivity, an experiment was performed to test a TMR device. A TMR gyroscope system model is implemented in the SIMULINK environment using parameter values obtained from calculations and some obtained from the experimental tests of the total sensitivity. Combining our separate results, a total sensitivity for the TMR gyroscope of 1.18 mV/A degrees/s was obtained along with a theoretical noise floor of 9.48 x 10(-5) A degrees/s/aeHz. Therefore, the designed TMR gyroscope provides high sensitivity while achieving a lower noise level.
机译：微加工陀螺仪背后的核心技术是检测弱科里奥利力，其噪声水平通过常规方法已达到其极限。在本文中，设计了一种基于隧道磁阻（TMR）效应的面内陀螺结构，提供了在MEMS振动陀螺中检测该力的装置。使用TMR，以实现高灵敏度。从设计陀螺结构的理论分析，获得了检测科里奥利力的结构敏感性。为TMR器件设计并模拟永磁体，并获得磁体灵敏度。为了获得磁阻灵敏度，进行实验以测试TMR器件。使用从计算中获得的参数值和从总灵敏度的实验测试中获得的参数值，在Simulink环境中实现了TMR陀螺系统模型。结合我们的单独结果，获得了1.18mV / a度为1.18 mV / a度的TMR陀螺仪的总灵敏度以及9.48×10（-5）度的理论噪声层。因此，设计的TMR陀螺仪在实现较低的噪声水平的同时提供高灵敏度。

著录项

  • 来源
    《Microsystem technologies》 |2019年第4期|共8页
  • 作者

    Li Mengwei; Ding Xicong; Qin Shiyang;

  • 作者单位

    North Univ China Key Lab Instrumentat Sci &

    Dynam Measurement Minist Educ Taiyuan 030051 Shanxi Peoples R China;

    North Univ China Key Lab Instrumentat Sci &

    Dynam Measurement Minist Educ Taiyuan 030051 Shanxi Peoples R China;

    North Univ China Key Lab Instrumentat Sci &

    Dynam Measurement Minist Educ Taiyuan 030051 Shanxi Peoples R China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路（IC）;
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号