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首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Design Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure
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Design Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure

机译：具有差分隧道磁阻传感结构的基于MEMS的陀螺仪的设计分析和仿真

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The design, analysis, and simulation of a new Micro-electromechanical System (MEMS) gyroscope based on differential tunneling magnetoresistance sensing are presented in this paper. The device is driven by electrostatic force, whereas the Coriolis displacements are transferred to intensity variations of magnetic fields, further detected by the Tunneling Magnetoresistance units. The magnetic fields are generated by a pair of two-layer planar multi-turn copper coils that are coated on the backs of the inner masses. Together with the dual-mass structure of proposed tuning fork gyroscope, a two-stage differential detection is formed, thereby enabling rejection of mechanical and magnetic common-mode errors concurrently. The overall conception is described followed by detailed analyses of proposed micro-gyroscope and rectangle coil. Subsequently, the FEM simulations are implemented to determine the mechanical and magnetic characteristics of the device separately. The results demonstrate that the micro-gyroscope has a mechanical sensitivity of 1.754 nm/°/s, and the micro-coil has a maximum sensitivity of 41.38 mOe/µm. When the detection height of Tunneling Magnetoresistance unit is set as 60 µm, the proposed device exhibits a voltage-angular velocity sensitivity of 0.131 mV/°/s with a noise floor of 7.713 × 10−6°/s/Hz in the absence of any external amplification.
机译：本文介绍了基于差分隧道磁阻感测的新型微机电系统（MEMS）陀螺的设计，分析和仿真。该装置由静电力驱动，而科里奥利位移被转移到磁场的强度变化，由隧道磁阻单元进一步检测。磁场由一对双层平面的多转铜线圈产生，所述两层平面铜线圈涂覆在内部质量块的背面上。与所提出的调谐叉陀螺的双质量结构一起形成两级差分检测，从而能够同时拒绝机械和磁共模态误差。描述了整体概念，然后描述了所提出的微陀螺仪和矩形线圈的详细分析。随后，实现了有限元模拟以单独确定设备的机械和磁特性。结果表明，微陀螺仪的机械灵敏度为1.754nm /°/°，微线圈的最大灵敏度为41.38 moe /μm。当隧道磁阻单元的检测高度设定为60μm时，所提出的装置在不存在的情况下表现出0.131 mV /°/秒的电压角速度灵敏度为0.131 mV /°/ s的噪声底板。在不存在的情况下，噪声层为7.713×10-6°/ hz任何外部放大。

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