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首页> 外文期刊>Smart Materials & Structures >Design, analysis, and experimental investigation of a single-stage and low parasitic motion piezoelectric actuated microgripper
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Design, analysis, and experimental investigation of a single-stage and low parasitic motion piezoelectric actuated microgripper

机译：单级和低寄生运动压电驱动微耳防微格的设计，分析和实验研究

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摘要

The demand for high precision micro/nano manipulation is increasing for advanced manufacturing technology. The precise motion of the microgripper jaw is required to achieve high performance micromanipulation tasks. The parasitic motion of the microgripper reduces placement accuracy during pick and place tasks. This paper presents an asymmetric design of piezoelectric actuated microgripper. It investigates key characteristics including parasitic motion, output displacement, and displacement amplification ratio. The microgripper is designed with a single-stage displacement amplification mechanism to form a compact layout. The design of the microgripper integrates the bridge-type mechanism and the parallelogram mechanisms. The bridge-type mechanism amplifies the piezoelectric actuator output and the parallelogram mechanisms offer linear motion of the gripper jaw. The analytical modeling and finite element analysis were conducted to evaluate the characteristics of the microgripper. The design parameters of the microgripper were optimized through several finite element analysis. Further, experimental studies were conducted to verify the characteristics of the microgripper. The parasitic motion of the jaw was obtained as less than 0.18% of the microgripper jaw motion in the x-direction. The mechanism of the microgripper also achieves a high positioning accuracy. Further, a high displacement amplification ratio and large output displacement can be achieved.
机译：对于先进的制造技术，对高精度微/纳米操纵的需求正在增加。需要微臂钳口的精确运动来实现高性能的微操纵任务。微型电动器的寄生运动在拾取和放置任务期间降低了放置精度。本文介绍了压电致动微格的不对称设计。它研究了寄生运动，输出位移和位移放大比例的关键特性。微臂设计有单级位移放大机构，以形成紧凑的布局。微型电动器的设计集成了桥式机构和平行四边形机制。桥式机构放大压电致动器输出和平行四边形机构提供夹爪的线性运动。进行分析建模和有限元分析以评估微臂的特性。通过几种有限元分析优化了微型电动器的设计参数。此外，进行了实验研究以验证微臂的特征。在X方向上获得钳口的寄生运动为小于0.18％的微臂钳口运动。微币的机制也实现了高定位精度。此外，可以实现高位移放大比和大输出位移。

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