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首页> 外文期刊>Journal of micro and nano manufacturing >Patterned Microstructure Array Fabrication by Using a Novel Standing Surface Acoustic Wave Device
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Patterned Microstructure Array Fabrication by Using a Novel Standing Surface Acoustic Wave Device

机译：通过使用新型站立表面声波装置图案化微结构阵列制造

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摘要

This paper develops a novel standing surface acoustic wave (SAW) device with three pairs of interdigital transducers (IDTs) to fabricate the patterned microstructure arrays with the assistance of ultraviolet (UV) polymerization. The working principle, structural design, and fabrication of the SAW device are presented. Then, experimental setup was conducted to investigate the fabrication process and method of the patterned microstructure arrays on a thin photosensitive polymer surface. By adjusting the working wavelength and input voltage and selecting the pairs of IDTs, several types of patterned microstructure arrays, such as linear and latticed undulate with different surface morphologies, could be fabricated. For the application of the microstructure arrays, L929 mouse fibroblasts are cultured on the surface with linear undulate microstructure arrays. Preliminary results showed that the cells aligned well with the direction of the patterned surface and the array can enhance the cell culturing. Therefore, using the developed SAW device with the assistance of UV polymerization is an effective method to fabricate the patterned microstructure arrays, which may have great potential in the applications of biomedical and/or microelectronic fields.
机译：本文开发了一种新型驻地声波（锯）装置，其具有三对叉分子换能器（IDTS），以在紫外（UV）聚合的辅助下制造图案化的微观结构阵列。呈现了锯装置的工作原理，结构设计和制造。然后，进行实验设置以研究在薄的光敏聚合物表面上的图案化微结构阵列的制造工艺和方法。通过调整工作波长和输入电压并选择对IDT的对，可以制造几种类型的图案化微结构阵列，例如用不同的表面形貌的线性和晶格波动。对于微结构阵列的应用，L929小鼠成纤维细胞在具有线性波状微结构阵列的表面上培养。初步结果表明，通过图案化表面的方向良好地对准细胞，并且阵列可以增强细胞培养。因此，在UV聚合的辅助中使用开发的SAW器件是制造图案化微结构阵列的有效方法，其在生物医学和/或微电子场的应用中可能具有很大的潜力。

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