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首页> 外文期刊>ACS applied materials & interfaces >Ferroelectricity in Hf0.5Zr0.5O2 Thin Films: A Microscopic Study of the Polarization Switching Phenomenon and Field-Induced Phase Transformations
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Ferroelectricity in Hf0.5Zr0.5O2 Thin Films: A Microscopic Study of the Polarization Switching Phenomenon and Field-Induced Phase Transformations

机译：HF0.5ZR0.5O2薄膜中的铁电：偏振切换现象和现场诱导的相变的微观研究

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摘要

Because of their full compatibility with the modern Si-based technology, the HfO2-based ferroelectric films have recently emerged as viable candidates for application in nonvolatile memory devices. However, despite significant efforts, the mechanism of the polarization switching in this material is still under debate. In this work, we elucidate the microscopic nature of the polarization switching process in functional Hf0.5Zr0.5O2-based ferroelectric capacitors during its operation. In particular, the static domain structure and its switching dynamics following the application of the external electric field have been monitored with the advanced piezoresponse force microscopy (PFM) technique providing a nm resolution. Separate domains with strong built-in electric field have been found. Piezoresponse mapping of pristine Hf0.5Zr0.5O2 films revealed the mixture of polar phase grains and regions with low piezoresponse as well as the continuum of polarization orientations in the grains of polar orthorhombic phase. PFM data combined with the structural analysis of pristine versus trained film by plan-view transmission electron microscopy both speak in support of a monoclinic-to-orthorhombic phase transition in ferroelectric Hf0.5Zr0.5O2 layer during the wake-up process under an electrical stress.
机译：由于其与现代SI的技术完全兼容，最近将HFO2的铁电薄膜成为在非易失性存储器件中应用的可行候选者。然而，尽管有重大努力，但这种材料中的极化切换的机制仍在辩论中。在这项工作中，我们在操作期间阐明了基于功能的HF0.5ZR0.5O2的偏振切换过程的显微性质。具体地，通过提供NM分辨率的高级压电响应力显微镜（PFM）技术，监测外部电场施加外部电场后的静域结构及其开关动力学。已经找到了具有强大内置电场的独立域。 PrizeOress响应映射的原始HF0.5ZR0.5O2薄膜揭示了极阶段和区域的混合物，具有低压电响应，以及极性正向晶相的晶粒中的偏振取向连续。通过平面透视透射电子显微镜与原始与训练膜的结构分析相结合，在电力应力下的唤醒过程中，在唤醒过程中均衡在铁电HF0.5ZR0.5O2层中的单斜倚对正交相转变的支持。

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