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SMALL-FEATURE-SIZE FAN-OUT KINOFORM ETCHED IN GAAS

机译：GAAS中的小功能尺寸扇出人形

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A binary fan-out kinoform for focusing and splitting an incident beam into a 4 X 4 spot array, with a largest deflection angle of 28 degrees, was designed, fabricated in GaAs, and evaluated. The kinoform was defined in resist with electron-beam lithography and etched into GaAs with chemically assisted ion-beam etching. Light at wavelength 0.98 mu m from a single-mode fiber was used to illuminate the kinoform. The efficiency was measured to be 34%, and the uniformity error for the 4 x 4 spots was 29%. Although the typical feature size of the kinoform is only roughly two wavelengths, we found that the scalar theory of diffraction can be used. A first kinoform was designed with the customary Fresnel-diffraction theory, which was found to be too coarse, resulting in a fan-out exhibiting some distortion. A second kinoform was designed with the more rigorous Fresnel-Kirchhoff expression, and its fan-out shows no distortion. (C) 1996 Optical Society of America [References: 7]
机译：设计了一种用于将入射光束聚焦并将其分成最大偏转角为28度的4 X 4点阵列的二元扇出的kinoform，并在GaAs中进行了制造和评估。通过电子束光刻法在抗蚀剂中定义了该基诺形式，并通过化学辅助离子束蚀刻将其蚀刻成GaAs。来自单模光纤的波长为0.98μm的光用于照亮千斤顶。测得效率为34％，4 x 4点的均匀度误差为29％。尽管kinoform的典型特征尺寸只有大约两个波长，但我们发现可以使用标量衍射理论。使用惯用的菲涅耳衍射理论设计了第一个千鸟格，发现它太粗糙了，导致扇出显示出一些失真。设计了第二种琴形，以更加严格的Fresnel-Kirchhoff表示，并且扇形显示没有失真。 （C）1996年美国眼镜学会[参考文献：7]

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