Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer

Takamasa Suzuki; Katsuyuki Kobayashi; Osami Sasaki

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Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer

机译：使用两波长正弦相位调制激光二极管干涉仪进行实时位移测量

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摘要

A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance.

机译：提出并演示了一种两波长干涉仪，该干涉仪使用相位不同但频率相同的两个单独的调制电流来实时检测更大程度的物体位移。测量误差为57 nm，大约是合成波长的1/80。我们已经证实，这种调制技术使我们能够为原型干涉仪配备简单的反馈控制系统，从而消除了外部干扰。

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《Applied optics》 |2000年第16期|共7页
作者
Takamasa Suzuki; Katsuyuki Kobayashi; Osami Sasaki;
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中图分类光学;
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1. Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer [J] . Takamasa Suzuki, Katsuyuki Kobayashi, Osami Sasaki Applied optics . 2000,第16期

机译：使用两波长正弦相位调制激光二极管干涉仪进行实时位移测量
2. Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement [J] . Bofan Wang, Xiangzhao Wang, Osami Sasaki, Applied optics . 2012,第12期

机译：对位移测量的激光二极管的强度调制不敏感的正弦相位调制干涉仪
3. Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement [J] . Bofan Wang, Xiangzhao Wang, Osami Sasaki, Applied optics . 2012,第12期

机译：对位移测量的激光二极管的强度调制不敏感的正弦相位调制干涉仪
4. Displacement sensor by a sinusoidal phase-modulating laser diode interferometer using optical fibers [C] . Osami Sasaki, Yousuke Arakawa, Takamasa Suzuki Pacific Rim Conference on Lasers and ELectro-Optics . 2005

机译：使用光纤通过正弦相位调制激光二极管干涉仪的位移传感器
5. Development of a real-time diode-laser mass flux sensor for simultaneous measurement of density and velocity of oxygen. [D] . Lyle, Kent Hamilton. 2006

机译：实时二极管激光质量通量传感器的开发，用于同时测量氧气的密度和速度。
6. Real-Time Correction and Stabilization of Laser Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano Positioning Stage Metrology [O] . Yindi Cai, Baokai Feng, Qi Sang, 2019

机译：用于长行程微/纳米定位台计量的微型均质干涉仪中激光二极管波长的实时校正和稳定化
7. Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement [O] . Wang BF (Wang Bofan), Wang XZ (Wang Xiangzhao), Sasaki O (Sasaki Osami), 2012

机译：对位移测量的激光二极管的强度调制不敏感的正弦相位调制干涉仪
8. Two-Wavelength HeNe Laser Interferometer [R] . Granneman, E. H. A. 1981

机译：双波长HeNe激光干涉仪

Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer

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