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A microwave method for determination of the recombination rate of nonequilibrium charge carriers in the bulk and at the surface of doped silicon wafers

机译:微波法测定掺杂硅片整体和表面非平衡电荷载流子的复合率

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摘要

A method for determining the lifetime of nonequilibrium carriers and the surface recombination rate in a silicon wafer with strong microwave absorption is proposed. The method is based on the simultaneous measurement of the photoconduction relaxation times in transmission and reflection of microwave radiation.
机译:提出了一种在微波吸收强的硅晶片中确定非平衡载流子寿命和表面复合率的方法。该方法基于同时测量微波辐射的透射和反射中的光导弛豫时间。

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