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Thermal flow sensor for ultra-low velocities based on printed circuit board technology

机译：基于印刷电路板技术的超低速热流传感器

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摘要

This paper presents a new thermal flow sensor for ultra-low velocities. The sensor was fabricated with the standard printed circuit board (PCB) technology. The technology and the simple sensor design would reduce costs in fabrication and packaging. A one-dimensional analytical model is presented in order to understand the working principle and to optimize the sensitivity. A two-dimensional finite element analysis (FEA) model is also presented. The paper describes the experimental investigations of the temperature field around a heater under the influence of forced convection. The experimental and theoretical optimization results lead to the design of the PCB sensor whose characteristics are presented at the end of the paper. With the current calibration facility, the sensor is able to measure air flow velocities less than 80 mm s{sup}(-1).
机译：本文提出了一种用于超低速的新型热流传感器。该传感器采用标准印刷电路板（PCB）技术制造。该技术和简单的传感器设计将减少制造和包装成本。为了理解工作原理并优化灵敏度，提出了一维分析模型。还提出了二维有限元分析（FEA）模型。本文描述了在强制对流作用下加热器周围温度场的实验研究。实验和理论上的优化结果导致了PCB传感器的设计，其特性在本文的最后介绍。使用当前的校准设备，该传感器能够测量小于80 mm s {sup}（-1）的气流速度。

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