Reconstruction of feature shape and dimension through data processing of sequenced various angle atomic force microscopy (AFM) scans

Andrzej Sikora

首页> 外文期刊>Measurement Science & Technology >Reconstruction of feature shape and dimension through data processing of sequenced various angle atomic force microscopy (AFM) scans

【24h】

Reconstruction of feature shape and dimension through data processing of sequenced various angle atomic force microscopy (AFM) scans

机译：通过序列化各种角度原子力显微镜（AFM）扫描的数据处理来重建特征形状和尺寸

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Atomic force microscopy is one of the most precise and reliable methods for investigation of micro- and nanostructures. One of the typical issues connected with precise measurements with this method is the influence of the shape of the tip. In this paper, an approach based on variable tip tilt will be presented. This method allows performing several measurements with different tilts of the tip and by processing the obtained data to reduce the broadening effect caused by the tip's cone angle. Preliminary results obtained with this method will also be presented.

机译：原子力显微镜是研究微观和纳米结构的最精确，最可靠的方法之一。与这种方法进行精确测量有关的典型问题之一是尖端形状的影响。在本文中，将提出一种基于可变尖端倾斜的方法。该方法允许使用尖端的不同倾斜度并通过处理获得的数据以减少由尖端的锥角引起的加宽效果来执行几次测量。还将介绍使用此方法获得的初步结果。

著录项

来源
《Measurement Science & Technology》 |2009年第8期|共7页
作者
Andrzej Sikora;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类计量学;
关键词
atomic force microscopy; data processing; multiple scan method; dimension and shape calculation;

机译：原子力显微镜;数据处理;多次扫描法;尺寸和形状计算;

相似文献

外文文献
中文文献
专利

1. Reconstruction of feature shape and dimension through data processing of sequenced various angle atomic force microscopy (AFM) scans [J] . Andrzej Sikora Measurement Science & Technology . 2009,第8期

机译：通过序列化各种角度原子力显微镜（AFM）扫描的数据处理来重建特征形状和尺寸
2. Measurement Simulation of Nanoscale Semicircle Profile by Constant-Amplitude Tapping Mode Atomic Force Microscopy (TM-AFM) and Influence of Probe Shape on Scanning Profile [J] . Zong-Ching Lin, Jun-Jie Huang Journal of the Chinese Society of Mechanical Engineers, Series C: Transactions of the Chinese Society of Mechanical Engineers . 2011,第3期

机译：恒幅轻击模式原子力显微镜（TM-AFM）对纳米半圆轮廓的测量模拟以及探针形状对扫描轮廓的影响
3. Characterization of atomic force microscopy (AFM) tip shapes by scanning hydrothermally deposited ZnO thin films [J] . G. W. Bao, S. F. Y. Li Talanta: The International Journal of Pure and Applied Analytical Chemistry . 1998,第4期

机译：通过扫描水热沉积的ZnO薄膜表征原子力显微镜（AFM）尖端形状
4. Quantitative Characterization of Damage Mechanisms in Ancient Ceramics by Quantitative X-ray Powder Diffraction (QXRD), Polarization Microscopy, Confocal Laser Scanning Microscopy (CLSM) and Non-contact Mode Atomic Force Microscopy (AFM) [C] . S. M. A. Emami, J. Volkmar, R. Trettin International Conference on Surface Modification Technologies . 2008

机译：定量X射线粉衍射（QXRD），偏振显微镜，共聚焦激光扫描显微镜（CLSM）和非接触模式原子力显微镜（AFM）的定量表征古陶瓷损伤机制
5. Scanning tunneling microscopy (STM) and atomic force microscopy (AFM) studies of carbon fibers and interfacial bonding in polyimide composites. [D] . Jangchud, Ittipol. 1996

机译：扫描隧道显微镜（STM）和原子力显微镜（AFM）研究聚酰亚胺复合材料中的碳纤维和界面结合。
6. Fabrication of Scanning Electrochemical Microscopy-Atomic Force Microscopy (SECM-AFM) Probes to Image Surface Topography and Reactivity at the Nanoscale [O] . Jeyavel Velmurugan, Amit Agrawal, Sangmin An, -1

机译：扫描电化学显微镜-原子力显微镜（SECM-AFM）探针的制备以纳米级成像表面形貌和反应性
7. First Steps in Limestone Weathering and Erosion: An Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) approach [O] . Joan J. Fornós, Lluís Gómez-Pujol, Joan Cifre, 2011

机译：石灰石风化和侵蚀的第一步：原子力显微镜（AFM）和扫描电子显微镜（SEM）方法
8. Atomic Force MIcroscopy and Scanning Tunneling Microscopy with a Combination Atomic Force Microscope/Scanning Tunneling Microscopy [R] . Marti, O., Drake, B., Gould, S., 1988

机译：原子力显微镜和扫描隧道显微镜与组合原子力显微镜/扫描隧道显微镜

Reconstruction of feature shape and dimension through data processing of sequenced various angle atomic force microscopy (AFM) scans

摘要

著录项

相似文献

相关主题

期刊订阅