Bulk acoustic resonator based on piezoelectric ZnO belts

Buchine BA; Hughes WL; Degertekin FL; Wang ZL

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Bulk acoustic resonator based on piezoelectric ZnO belts

机译：基于压电ZnO带的体声谐振器

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In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt-Leedom-Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.

机译：本文介绍了基于ZnO带的体声谐振器。该设备在作为电子滤波器和质量传感器的应用中显示出巨大的希望。使用矢量网络分析对所制造的器件进行表征，并分别在大约247 MHz和754 MHz处观察到共振的一次谐波和三次谐波。一维Krimholt-Leedom-Matthaei模型用于预测设备的谐振频率并确认观察到的行为。

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《Nano letters》 |2006年第6期|共5页
作者
Buchine BA; Hughes WL; Degertekin FL; Wang ZL;
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正文语种 eng
中图分类特种结构材料;
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NANOBELTS; FILM;

机译：纳米带;电影;

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1. Bulk acoustic resonator based on piezoelectric ZnO belts [J] . Buchine BA, Hughes WL, Degertekin FL, Nano letters . 2006,第6期

机译：基于压电ZnO带的体声谐振器
2. UV sensing using film bulk acoustic resonators based on Au-ZnO/piezoelectric-ZnO/Al structure [J] . Xiaolei Bian, Hao Jin, Xiaozhi Wang, Scientific reports. . 2015,第1期

机译：使用基于Au / n-ZnO /压电-ZnO / Al结构的薄膜压电谐振器进行UV感测
3. Nitrogen [N]-incorporated ZnO piezoelectric thin films and their application for ultra-small film bulk acoustic wave resonator device fabrication [J] . Eunju Lee, Ruirui Zhang, Giwan Yoon Journal of Applied Physics . 2011,第7期

机译：掺氮[N]的ZnO压电薄膜及其在超小薄膜体声波谐振器中的应用
4. PLD elaboration of piezoelectric ZnO thin film for 540 MHz Al/ZnO/Pt bulk acoustic wave resonator [C] . Serhane Rafik, Khales Hammouche, Aouimeur Walid, 2013 IEEE International Symposium on the Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy . 2013

机译：540 MHz Al / ZnO / Pt体声波谐振器的压电ZnO薄膜的PLD制作
5. Piezoelectrically-Transduced ZnO-on-Diamond Resonators with Enhanced Signal-to-Noise Ratio and Power-Handling Capability for Sensing and Wireless Communication Applications [D] . Han, Xu. 2021

机译：压电转导的ZnO-型谐振器，具有增强的信噪比和用于感测和无线通信应用的动力处理能力
6. UV sensing using film bulk acoustic resonators based on Au-ZnO/piezoelectric-ZnO/Al structure [O] . Xiaolei Bian, Hao Jin, Xiaozhi Wang, -1

机译：使用基于Au / n-ZnO /压电-ZnO / Al结构的薄膜体声谐振器进行UV感测
7. Bulk Acoustic Resonator Based on Piezoelectric ZnO Belts [O] . Brent A. Buchine, William L. Hughes, F. Levent Degertekin, 2006

机译：基于压电ZnO带的体声波谐振器
8. Dual Mode Thin Film Bulk Acoustic Resonators (FBARs) Based on AlN, ZnO and GaN Films with Tilted c-Axis Orientation [R] . Wang, Q. 2010

机译：基于具有倾斜c轴取向的alN，ZnO和GaN薄膜的双模薄膜体声波谐振器（FBaR）

Bulk acoustic resonator based on piezoelectric ZnO belts

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