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Nucleation and growth of GaN nanowires on Si(111) performed by molecular beam epitaxy

机译:通过分子束外延在Si(111)上进行GaN纳米线的成核和生长

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摘要

GaN nanowires (NWs) have been grown on Si(111) substrates by plasma-assisted molecular beam epitaxy (PAMBE). The nucleation process of GaN-NWs has been investigated in terms of nucleation density and wire evolution with time for a given set of growth parameters. The wire density increases rapidly with time and then saturates. The growth period until the nucleation of new nanowires is terminated can be defined as the nucleation stage. Coalescence of closely spaced nanowires reduces the density for long deposition times. The average size of the well-nucleated NWs shows linear time dependence in the nucleation stage. High-resolution transmission electron microscopy measurements of alternating GaN and AlN layers give valuable information about the length and radial growth rates for GaN and AlN in NWs.
机译:GaN纳米线(NWs)已通过等离子辅助分子束外延(PAMBE)生长在Si(111)衬底上。对于给定的一组生长参数,已经研究了GaN-NWs的成核过程,涉及成核密度和导线随时间的演变。线密度随时间快速增加,然后饱和。直到新纳米线的成核终止为止的生长时期可以被定义为成核阶段。紧密排列的纳米线的聚结降低了长沉积时间的密度。成核的净重的平均大小在成核阶段显示出线性时间依赖性。交替的GaN和AlN层的高分辨率透射电子显微镜测量提供了有关NW中GaN和AlN的长度和径向生长速率的有价值的信息。

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