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Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz

机译：基于硅和石英直接键合的具有硅尖的石英晶体扫描探针微悬臂

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This paper reports on the design, fabrication and characterization of cantilever-shaped quartz-crystal resonators for scanning probe microscopy (SPM) in order to operate under various environments, especially in liquids for biological applications. The cantilevers have functions of self-sensing and self-actuation using piezoelectric effects, and these properties are demonstrated experimentally. Compared to conventional SPM cantilevers, this quartz cantilever is easy to utilize as a SPM based force sensor in liquids because the self-actuating properties can lead to no spurious resonant peaks. In addition, the self-sensing properties will enable its use even in an opaque liquid and can simplify the SPM system. In this research, quartz cantilevers are fabricated on silicon using a silicon-quartz direct bonding technique, and the sharp silicon tip is integrated at the end of the cantilever as well. Additionally, the electrical Q-enhancement (active Q-control) was tested.
机译：本文报道了用于扫描探针显微镜（SPM）的悬臂形石英晶体谐振器的设计，制造和表征，以便在各种环境下（特别是在生物应用液体中）工作。悬臂具有利用压电效应的自感应和自驱动功能，并且这些性质已通过实验证明。与传统的SPM悬臂相比，该石英悬臂易于在液体中用作基于SPM的力传感器，因为其自驱动特性不会导致任何虚假的共振峰。此外，即使在不透明的液体中，自感应特性也可以使其使用，并且可以简化SPM系统。在这项研究中，石英悬臂是使用硅-石英直接键合技术在硅上制造的，并且尖锐的硅尖端也集成在悬臂的末端。此外，还测试了电Q增强功能（主动Q控制）。

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