Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes

Oon CH; Thong JTL

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Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes

机译：简单，低成本的技术，用于光刻自对准顶部金属与纳米线和纳米管的接触

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We propose a new simple, low-cost method for providing all-round metal contacts to one-dimensional structures such as carbon nanotubes and nanowires on a transparent substrate. The nanostructures are first positioned in place to bridge a electrode gap by dielectrophoresis. The electrode structure is then used as a self-aligned mask during the subsequent photolithography through illumination from the substrate backside. This is followed by metallization and lift-off. Our measurements on multi-walled carbon nanotubes thus contacted show reasonable yield and good electrical contacts for the process carried out on a glass slide as the substrate.

机译：我们提出了一种新的简单，低成本的方法，用于在透明基板上为诸如碳纳米管和纳米线等一维结构提供全方位的金属接触。首先将纳米结构放置在适当的位置，以通过介电电泳弥合电极间隙。然后在随后的光刻过程中，通过从基板背面进行照射，将电极结构用作自对准掩模。接下来是金属化和剥离。我们对这样接触的多壁碳纳米管的测量显示出合理的产率和良好的电接触，适合在以载玻片为基材的过程中进行。

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《Nanotechnology》 |2008年第45期|共6页
作者
Oon CH; Thong JTL;
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原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词
CARBON NANOTUBES; INTEGRATION; GROWTH;

机译：碳纳米管;整合;增长;

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1. Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes [J] . Oon CH, Thong JTL Nanotechnology . 2008,第45期

机译：简单，低成本的技术，用于光刻自对准顶部金属与纳米线和纳米管的接触
2. Density-Controlled Growth of Aligned ZnO Nanowires Sharing a Common Contact:A Simple,Low-Cost,and Mask-Free Technique for Large-Scale Applications [J] . Xudong Wang, Jinhui Song, Christopher J.Summers, The journal of physical chemistry, B. Condensed matter, materials, surfaces, interfaces & biophysical . 2006,第15期

机译：共享公共触点的取向ZnO纳米线的密度控制生长：一种适用于大规模应用的简单，低成本且无掩模的技术
3. Carbon Nanotube Sheet as Top Contact Electrode for Nanowires: Highly Versatile and Simple Process [J] . Ternon Celine, Dupas Florence, Stein Sergio, Journal of nanoscience and nanotechnology . 2015,第2期

机译：碳纳米管片作为纳米线的顶部接触电极：高度通用和简单的工艺
4. SIMPLE LOW-COST METALLIZATION SCHEME TO IMPROVE THE EFFICIENCY OF EPITAXIAL EMITTER SOLAR CELLS WITH NANOWIRE TEXTURIZATION [C] . Donny Lai, Soon Chye Heng, Aliénor Togonal, European Photovoltaic Solar Energy Conference and Exhibition . 2012

机译：简单的低成本金属化方案，通过纳米织构化提高表观发射体太阳能电池的效率
5. Ballistic electron emission microscopy and internal photoemission study on metal bi-layer/oxide/silicon, high-k oxide/silicon, and "end-on" metal contacts to vertical silicon nanowires. [D] . Cai, Wei. 2010

机译：金属双层/氧化物/硅，高k氧化物/硅以及垂直硅纳米线的“端对端”金属触点的弹道电子发射显微镜和内部光发射研究。
6. Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices [O] . Nhi M. Doan, Liangliang Qiang, Zhe Li, 2015

机译：用于先进生物测定设备的纳米线和微滤器的低成本光刻加工
7. Density-Controlled Growth of Aligned ZnO Nanowires Sharing a Common Contact: A Simple, Low-Cost, and Mask-Free Technique for LargeScale Applications [O] . Xudong Wang, Jinhui Song, Christopher J. Summers, 2015

机译：对齐ZnO纳米线的密度控制生长共享接触：一种简单，低成本，无掩模的技术，适用于大规模应用
8. Which nanowire couples better electrically to a metal contact: Armchair or zigzag nanotube [R] . Anantram, M. P. 2001

机译：哪种纳米线更好地与金属触点电耦合：扶手椅或之字形纳米管

Simple, low-cost technique for photolithographic self-aligned top metal contacts to nanowires and nanotubes

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