Proximity effects causing thickening and bending of closely spaced, free-standing pillars grown by electron-beam-induced deposition are investigated. It is shown that growth of a new pillar induces deposition of a layer of additional material on the side of already grown pillars facing the new pillar. We present experimental results which suggest that the bending of pillars is caused by shrinkage of the newly formed layer on exposure to the primary electron beam.
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