Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors - A proof of concept

Santra S.; Ali S.Z.; Guha P.K.; Zhong G.; Robertson J.; Covington J.A.; Milne W.I.; Gardner J.W.; Udrea F.

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Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors - A proof of concept

机译：低成本微传感器用碳纳米管在CMOS晶片后的生长-概念验证

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Here we demonstrate a novel technique to grow carbon nanotubes (CNTs) on addressable localized areas, at wafer level, on a fully processed CMOS substrate. The CNTs were grown using tungsten micro-heaters (local growth technique) at elevated temperature on wafer scale by connecting adjacent micro-heaters through metal tracks in the scribe lane. The electrical and optical characterization show that the CNTs are identical and reproducible. We believe this wafer level integration of CNTs with CMOS circuitry enables the low-cost mass production of CNT sensors, such as chemical sensors.

机译：在这里，我们演示了一种新技术，可以在完全加工的CMOS基板上的晶圆级可寻址局部区域上生长碳纳米管（CNT）。使用钨微型加热器（局部生长技术）在碳纳米管上通过划线道将相邻的微型加热器通过金属轨道连接起来，从而在高温下以晶片级生长CNT。电气和光学表征表明，CNT是相同且可重现的。我们相信，CNT与CMOS电路的晶圆级集成可以实现CNT传感器（例如化学传感器）的低成本批量生产。

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《Nanotechnology》 |2010年第48期|共7页
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Santra S.; Ali S.Z.; Guha P.K.; Zhong G.; Robertson J.; Covington J.A.; Milne W.I.; Gardner J.W.; Udrea F.;
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1. Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors - A proof of concept [J] . Santra S., Ali S.Z., Guha P.K., Nanotechnology . 2010,第48期

机译：低成本微传感器用碳纳米管在CMOS晶片后的生长-概念验证
2. Wafer-Level Electrical Evaluation of Vertical Carbon Nanotube Bundles as a Function of Growth Temperature [J] . Bart Vereecke, Marleen H. van der Veen, Masahito Sugiura, Japanese journal of applied physics . 2013,第4Issue2期

机译：垂直碳纳米管束的晶圆级电学评估与生长温度的关系
3. Length separation of single-walled carbon nanotubes and its impact on structural and electrical properties of wafer-level fabricated carbon nanotube-field-effect transistors [J] . Boettger Simon, Hermann Sascha, Schulz Stefan E., Nanotechnology . 2016,第43期

机译：单壁碳纳米管的长度分离及其对晶圆级制造的碳纳米管场效应晶体管的结构和电性能的影响
4. Integrated Wafer-Scale Growth and Transfer of Directional Carbon Nanotubes and Misaligned-Carbon-Nanotube-Immune Logic Structures [C] . Nishant Patil, Albert Lin, Edward R. Myers, Symposium on VLSI Technology . 2008

机译：集成晶片级生长和定向碳纳米管的转移和未对准 - 碳 - 纳米管 - 免疫逻辑结构
5. Growth of carbon nanotubes on patterned silicon wafer by thermal chemical vapor deposition (CVD). [D] . Wang, Chiu-Hui. 2005

机译：通过热化学气相沉积（CVD）在图案化的硅晶片上生长碳纳米管。
6. Biocompatibility and Biomechanical Effect of Single Wall Carbon Nanotubes Implanted in the Corneal Stroma: A Proof of Concept Investigation [O] . Alfredo Vega-Estrada, Joaquin Silvestre-Albero, Alejandra E. Rodriguez, 2016

机译：单壁碳纳米管植入角膜基质的生物相容性和生物力学效应：概念研究的证明。
7. Evaluation of Anisotropic Conductive Films Based on Vertical Fibers for Post-CMOS Wafer-Level Packaging [O] . Diop MamadouDiobet, Radji Moufid, Hamoui Anas A., 2013

机译：基于垂直纤维的各向异性导电膜用于CMOS后晶圆级封装的评估
8. Evaluation of Carbon Nanotube Thin Films for Optically Transparent Microwave Applications Using On-Wafer Probing of Corbino Disc Test Structures. [R] . Toonen, R. C., Doggett, J. B., Hirsch, S. G., 2013

机译：用Corbino圆盘试验结构的晶圆探测评价光学透明微波应用碳纳米管薄膜。

Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors - A proof of concept

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