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Carbon nanotube tip probes: stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors

机译：碳纳米管尖端探针：扫描探针显微镜的稳定性和横向分辨率及其在半导体表面科学中的应用

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摘要

In this paper we present results on the stability and lateral resolution capability of carbon nanotube (CNT) scanning probes as applied to atomic force microscopy (AFM). Surface topography images of ultra-thin films (2-5 nm thickness) obtained with AFM are used to illustrate the lateral resolution capability of single-walled carbon nanotube probes. Images of metal films prepared by ion beam sputtering exhibit grain sizes ranging from greater than 10 nm to as small as approx 2 nm for gold and iridium respectively. In addition, the imaging stability and lifetime of multi-walled carbon nanotube scanning probes are studied on a relatively hard surface of silicon nitride (Si_3N_4). AFM images of the Si_3N_4 surface collected after more than 15 h of continuous scanning show no detectable degradation in lateral resolution. These results indicate the general feasibility of CNT tips and scanning probe microscopy for examining nanometer-scale surface features of deposited metals as well as non-conductive thin films. AFM coupled with CNT tips offers a simple and nondestructive technique for probing a variety of surfaces, and has immense potential as a surface characterization tool in integrated circuit manufacture.
机译：在本文中，我们介绍了应用于原子力显微镜（AFM）的碳纳米管（CNT）扫描探针的稳定性和横向分辨率的结果。使用AFM获得的超薄膜（2-5 nm厚度）的表面形貌图像用于说明单壁碳纳米管探针的横向分辨率。通过离子束溅射制备的金属膜的图像分别显示出金和铱的晶粒尺寸范围从大于10 nm到小至约2 nm。此外，在氮化硅（Si_3N_4）相对较硬的表面上研究了多壁碳纳米管扫描探针的成像稳定性和寿命。在连续扫描超过15小时后收集的Si_3N_4表面的AFM图像显示横向分辨率没有可检测到的下降。这些结果表明CNT尖端和扫描探针显微镜检查沉积金属以及非导电薄膜的纳米级表面特征的一般可行性。原子力显微镜与碳纳米管尖端相结合，为探测多种表面提供了一种简单且无损的技术，并且作为集成电路制造中的表面表征工具具有巨大的潜力。

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