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Plasma polymerisation of an allyl organophosphate monomer by atmospheric pressure pulsed-PECVD: insights into the growth mechanisms

机译:通过大气压脉冲-PECVD进行有机磷酸烯丙酯单体的等离子体聚合:洞悉生长机理

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Atmospheric plasma deposition of DiEthylAllyl Phosphate (DEAP) has been performed to study the behaviour of an allylic phosphate-based monomer in a nitrogen Atmospheric Pressure-Dielectric Barrier Discharge (AP-DBD). The deposition kinetics and chemical structures of the different coatings have been studied as a function of the duty cycle and the power dissipated in the discharge. It has been highlighted that it is possible to obtain different chemistries, from organic coatings in which the monomer structure is remaining to inorganic polyphosphate-based ones. Different mechanisms of deposition have been outlined and discussed taking into account the deposition kinetics, the coatings chemistries and the monomer reactivity in the gas phase.
机译:已经进行了磷酸二乙基烯丙基磷酸酯(DEAP)的大气压等离子体沉积,以研究基于磷酸烯丙基的单体在氮气中的大气压-介电阻挡放电(AP-DBD)中的行为。已经研究了不同涂层的沉积动力学和化学结构,其取决于占空比和放电中消耗的功率。已经强调,有可能获得不同的化学性质,从保留单体结构的有机涂层到基于无机多磷酸盐的涂层。考虑到沉积动力学,涂层化学性质和气相中的单体反应性,已经概述并讨论了不同的沉积机理。

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