New Method for the Langmuir Probe Diagnostics of Polymerizing Plasmas

K. V. Rudenko; A. V. Myakonkikh; A. A. Orlikovsky; A. N. Pustovit

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New Method for the Langmuir Probe Diagnostics of Polymerizing Plasmas

机译：Langmuir探针诊断聚合等离子体的新方法

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A pulsed Langmuir probe method of plasma diagnostics is proposed and validated for low-pressure, high-density, low-temperature plasmas capable of producing a nonconducting film on the probe surface. The method essentially involves cyclic probe-surface cleaning by ion bombardment. A switching pattern of probe potential is designed, taking into account the mechanism by which a space-charge region is formed near the probe. The method is successfully employed in an experiment on inductively coupled CHF{sub}3 and Ar plasmas.

机译：提出了等离子体诊断的脉冲Langmuir探针方法，并已针对能够在探针表面产生非导电膜的低压，高密度，低温等离子体进行了验证。该方法主要涉及通过离子轰击进行的循环探针表面清洁。考虑到在探针附近形成空间电荷区域的机制，设计探针电位的切换模式。该方法已成功用于感应耦合CHF {sub} 3和Ar等离子体的实验中。

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《Russian Microelectronics》 |2007年第1期|共13页
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K. V. Rudenko; A. V. Myakonkikh; A. A. Orlikovsky; A. N. Pustovit;
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正文语种 eng
中图分类微电子学、集成电路（IC）;
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1. New Method for the Langmuir Probe Diagnostics of Polymerizing Plasmas [J] . K. V. Rudenko, A. V. Myakonkikh, A. A. Orlikovsky, Russian Microelectronics . 2007,第1期

机译：Langmuir探针诊断聚合等离子体的新方法
2. Sweep Langmuir Probe and Triple Probe Diagnostics for Transient Plasma Produced by Hypervelocity Impact [J] . TANG Enling, XIANG Shenghai, YANG Minghai, 等离子体科学和技术（英文版） . 2012,第008期

机译：超高速撞击产生的瞬时血浆的扫掠Langmuir探针和三探针诊断
3. Advances in Langmuir probe diagnostics of the plasma potential and electron-energy distribution function in magnetized plasma [J] . Popov Tsv K., Dimitrova M., Ivanova P., Plasma Sources Science & Technology . 2016,第3期

机译：Langmuir探针在磁化等离子体中的等离子体电势和电子能量分布函数的诊断研究进展
4. Langmuir probe diagnostics of low-pressure inductively coupled argon plasmas in a magnetic field [C] . E. Meshcheryakova, M. Zibrov, A. Kaziev, Conference on Plasma-Surface Interactions . 2015

机译：Langmuir磁场中低压电感耦合氩等离子体的探测器探测器
5. Langmuir Probe Diagnostics in Dusty, Non-thermal Plasmas [D] . Woodard, Austin T. 2020

机译：Langmuir探测器在尘土飞扬，非热等离子体中的探测器
6. Image-Based Methods to Investigate Synchronization between Time Series Relevant for Plasma Fusion Diagnostics [O] . Teddy Craciunescu, Andrea Murari, Ernesto Lerche, 2020

机译：基于图像的方法以研究对等离子融合诊断的时间序列之间的同步
7. Diagnostics of classical and dusty plasmas w ith collecting and emissive langmuir probes = Diagnosis de plasmas clásicos y granulares mediante sondas colectoras y emisoras de Langmuir [O] . Tierno Gomez Sandra Pilar 2014

机译：使用收集和发射的朗缪尔探针对经典和多尘血浆进行诊断=使用朗缪尔收集和发射探针对经典和颗粒血浆进行诊断

New Method for the Langmuir Probe Diagnostics of Polymerizing Plasmas

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