We describe a novel method of processing complex phasors in digital holographic interferometry (DHI). Unlikethe commonly used digital phase subtraction method that operates on the phase itself, the proposed method operates on the complex phasor instead. Two temporal phase retrieval algorithms are developed in which the complex phasor of each pixel is measured and analyzed as a function of time. The developed algorithms are demonstrated in profile measurement of step heights. Experimental results show that the proposed phase retrieval algorithms for DHI perform well compared with conventional methods.
展开▼
