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首页> 外文期刊>Optics Letters >Design and fabrication of a microlens array by use of a slow tool servo
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Design and fabrication of a microlens array by use of a slow tool servo

机译：使用慢速工具伺服器设计和制造微透镜阵列

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摘要

In recent years it has become possible to fabricate free-form optics by use of multiaxis ultraprecision machines. Here a 5 X 5 microlens array is fabricated by using an ultraprecision diamond turning machine equipped with four independent axes. Unlike the conventional process where a single diamond tool is used to machine one lens at a time, this research demonstrates the development of an innovative diamond tool trajectory that allows the entire microlens array to be machined in a single operation. The machined microlens array is measured for both curve conformity and surface roughness. Compared to the conventional approach where indexing the workpiece is difficult and unreliable, this process can produce microlenses with accurate geometry and optical surface finish. This unique process is described in detail from optical measurement to machining process design and development to final results. This research also demonstrates the possibility of fabricating any arbitrary shape with the same approach.
机译：近年来，已经可以通过使用多轴超精密机器来制造自由形式的光学器件。在这里，通过使用配备有四个独立轴的超精密金刚石车床来制造5 X 5微透镜阵列。与传统工艺一次使用一个金刚石工具一次加工一个镜片的传统工艺不同，本研究证明了一种创新的金刚石工具轨迹的发展，该轨迹允许整个微透镜阵列在单个操作中进行加工。测量加工的微透镜阵列的曲线一致性和表面粗糙度。与传统方法相比，在传统方法中难以对工件进行分度和不可靠，该方法可以生产出具有精确几何形状和光学表面光洁度的微透镜。从光学测量到机械加工设计，开发到最终结果，都将详细描述这一独特的过程。这项研究还证明了用相同方法制造任意形状的可能性。

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