Multichannel Nomarski microscope with polarization modulation: performance and applications

Gleyzes P; Boccara AC; SaintJahnes H

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Multichannel Nomarski microscope with polarization modulation: performance and applications

机译：具有偏振调制的多通道Nomarski显微镜：性能和应用

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Using a two-dimensional CCD array, a photoelastic modulator, and a commercial Nomarski microscope, we built a differential polarization interferometer. Multichannel lock-in detection of the signal allowed us to reach a shot-noise limit corresponding to 5-pm path differences for a few seconds of recording time. This interferometer was used as a surface profilometer as well as a system for imaging through scattering media. (C) 1997 Optical Society of America.

机译：我们使用二维CCD阵列，光弹性调制器和商用Nomarski显微镜，构建了差分偏振干涉仪。信号的多通道锁定检测使我们可以在几秒钟的记录时间内达到对应于5 pm路径差异的散粒噪声极限。该干涉仪被用作表面轮廓仪以及用于通过散射介质成像的系统。（C）1997年美国眼镜学会。

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《Optics Letters》 |1997年第20期|共3页
作者
Gleyzes P; Boccara AC; SaintJahnes H;
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正文语种 eng
中图分类光学;
关键词
DETECTOR APPROACH; SCATTERING MEDIUM; LIGHT; PROFILOMETRY; PROFILE; PHOTONS;

机译：探测器方法;散射介质;光;轮廓度;轮廓;光子;

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1. Multichannel Nomarski microscope with polarization modulation: performance and applications [J] . Gleyzes P, Boccara AC, SaintJahnes H Optics Letters . 1997,第20期

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Multichannel Nomarski microscope with polarization modulation: performance and applications

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