Studies on the structural, electrical and optical properties of Al-doped ZnO thin films prepared by chemical spray deposition

B. JOSEPH; P.K. MANOJ; V.K. VAIDYAN

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Studies on the structural, electrical and optical properties of Al-doped ZnO thin films prepared by chemical spray deposition

机译：化学喷涂沉积Al掺杂ZnO薄膜的结构，电学和光学性质研究

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Aluminium-doped zinc oxide films have been prepared by chemical spray pyrolysis technique. Variation of structural, morphological, electrical and optical properties with doping concentration is investigated in detail. The films were highly transparent to visible radiation and electrically conductive. XRD studies have shown that the films were polycrystalline in nature with (0 0 2) preferred orientation. SEM studies have revealed the smooth polycrystalline morphology of the films. Films deposited at optimum conditions have exhibited a resistivity of 2.45 x 10~(-4) dm with an optical transmittance of 97 percent at 550 nm.

机译：铝掺杂的氧化锌薄膜已通过化学喷雾热解技术制备。详细研究了结构，形态，电学和光学性质随掺杂浓度的变化。所述膜对可见辐射和导电性是高度透明的。 XRD研究表明，薄膜本质上是多晶的，具有（0 0 2）较好的取向。 SEM研究表明该膜具有光滑的多晶形态。在最佳条件下沉积的薄膜表现出2.45 x 10〜（-4）dm的电阻率，在550 nm下的透光率为97％。

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《CERAMICS INTERNATIONAL》 |2006年第5期|共7页
作者
B. JOSEPH; P.K. MANOJ; V.K. VAIDYAN;
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正文语种 eng
中图分类硅酸盐工业;
关键词
Zinc oxide films; Aluminium doping; Spray pyrolysis; Transparent conducting films;

机译：氧化锌膜;铝掺杂;喷雾热解;透明导电膜;

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1. Studies on the structural, electrical and optical properties of Al-doped ZnO thin films prepared by chemical spray deposition [J] . B. JOSEPH, P.K. MANOJ, V.K. VAIDYAN CERAMICS INTERNATIONAL . 2006,第5期

机译：化学喷涂沉积Al掺杂ZnO薄膜的结构，电学和光学性质研究
2. Studies on optical, structural and electrical properties of atomic layer deposited Al-doped ZnO thin films with various Al concentrations and deposition temperatures [J] . Maeng W.J., Lee J.-W., Lee J.H., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2011,第44期

机译：不同原子浓度和沉积温度的原子层沉积铝掺杂ZnO薄膜的光学，结构和电学性质研究
3. Studies on the structural, morphological, optical and electrical properties of Al-doped ZnO nanorods prepared by electrochemical deposition [J] . Henni Abdellah, Merrouche Abdallah, Telli Laid, Journal of Electroanalytical Chemistry: An International Journal Devoted to All Aspects of Electrode Kinetics, Interfacial Structure, Properties of Electrolytes, Colloid and Biological Electrochemistry . 2016,第Null期

机译：电化学沉积制备Al掺杂ZnO纳米棒的结构，形貌，光学和电学性质的研究
4. ZnO:Xn thin solid films deposited by chemical spray. Effect of deposition temperature on the electrical, optical, structural and morphological properties [C] . H. Gomez, J. L. Gonzalez-Vidal, L. Castellanos, International Conference on Electrical Engineering, Computing Science and Automatic Control . 2009

机译：ZnO：XN薄薄膜通过化学喷雾沉积。沉积温度对电，光学，结构和形态特性的影响
5. Structural, dielectric, and optical properties of potassium tantalate niobate thin films prepared by metalorganic chemical vapor deposition [D] . Nichols, Barbara Michelle. 2000

机译：金属有机化学气相沉积法制备钽酸钽铌酸钾薄膜的结构，介电和光学性质
6. Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer deposition [O] . Qiongqiong Hou, Fanjie Meng, Jiaming Sun 2013

机译：原子层沉积制备Al掺杂ZnO和ZnAl2O4薄膜的电学和光学性质
7. Investigations on impact of post-heat temperature on structural, optical and electrical properties of Al-doped ZnO thin films prepared by sol-gel method [O] . M. Mohammadi 2010

机译：热温后热温度对溶胶 - 凝胶法制备的Al掺杂ZnO薄膜结构，光学和电性能的研究

Studies on the structural, electrical and optical properties of Al-doped ZnO thin films prepared by chemical spray deposition

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