• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Sensors and Actuators, A. Physical >Five-axis motion sensor with electrostatic drive and capacitive detection fabricated by silicon bulk micromachining
【24h】

Five-axis motion sensor with electrostatic drive and capacitive detection fabricated by silicon bulk micromachining

机译：通过硅体微加工制造的具有静电驱动和电容检测的五轴运动传感器

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

We have developed a five-axis motion sensor with electrostatic drive and capacitive detection by using silicon bulk-micromachining technique. This sensor has a seismic mass which is constantly vibrated along Z-axis by electrostatic force at the resonant frequency of 1875 Hz. Since the Z-axis acceleration (A(z)) translates a mass parallel and the X-, Y-axis accelerations (A(x), A(y)) tilt a mass, three-axis accelerations can be detected by capacitance change. Coriolis force induced by two-axis angular rates (Omega(x), Omega(y)) makes tilting vibration of a mass synchronizing with driving frequency. Therefore, two-axis angular rates can be detected separating from the accelerations. Measured sensitivities of Z- and X-(Y-) axis accelerations were approximately 20 and 6 fF/G, respectively, and the cross-axis sensitivity was less than 5%. The sensitivities of two-axis angular rates around X- and Y-axis are approximately 3 aF/(deg/s). The cross-axis sensitivity of Omega(x) against Omega(y) was less than 3%, and that of Omega(z) against Omega(x)(Omega(y)) was not observed. The chip size of developed sensor is 8.4 mm x 8.0 mm x 1.4 mm. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 8]
机译：我们已经开发了一种五轴运动传感器，该技术使用硅体微加工技术进行静电驱动和电容检测。该传感器具有地震质量，该地震质量通过静电力沿Z轴不断振动，共振频率为1875 Hz。由于Z轴加速度（A（z））平移质量而X，Y轴加速度（A（x），A（y））倾斜质量，因此可以通过电容变化检测三轴加速度。由两轴角速率（Omega（x），Omega（y））引起的科里奥利力使质量的倾斜振动与驱动频率同步。因此，可以与加速度分开地检测出两轴角速度。 Z-轴和X-（Y-）轴加速度的测量灵敏度分别约为20和6 fF / G，并且横轴灵敏度小于5％。围绕X轴和Y轴的两轴角速率的灵敏度约为3 aF /（deg / s）。 Omega（x）对Omega（y）的横轴灵敏度小于3％，未观察到Omega（z）对Omega（x）（Omega（y））的横轴灵敏度。开发的传感器的芯片尺寸为8.4 mm x 8.0 mm x 1.4 mm。 （C）2002 Elsevier Science B.V.保留所有权利。 [参考：8]

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号