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Determination of surface states in hydrogenated amorphous silicon by subgap absorption measurements

机译:亚能隙吸收法测定氢化非晶硅中的表面态

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Constant-photocurrent measurement and photothermal deflection spectroscopy have been used as complementary techniques to measure the density of surface states in hydrogenated amorphous silicon (a-Si:H). This method of determining surface states obviates the problem of sun-to-run variation in the sample properties encountered while measuring surface states through thickness variation. For calculations, we have taken several distributions of surface states as well as bulk states. The estimated total density of surface states is found to be insensitive to the shape of the distributions chosen. The method has been used to study the change in the density of surface states, after exposing a-Si:H to various treatments, far example light soaking, etching, and exposure to plasmas. [References: 23]
机译:恒定光电流测量和光热偏转光谱已被用作补充技术来测量氢化非晶硅(a-Si:H)中表面态的密度。这种确定表面状态的方法消除了在通过厚度变化测量表面状态时遇到的样品特性在日光下运行的问题。为了进行计算,我们采用了表面状态和体积状态的几种分布。发现估计的表面状态总密度对所选分布的形状不敏感。在将a-Si:H进行各种处理(例如光浸泡,蚀刻和暴露于等离子体)之后,该方法已用于研究表面态密度的变化。 [参考:23]

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