The improvement in SC-1 bath lifetime was studied by adding complexing agents: TEA, EDTA, CDTA, DTPA and DTPMP, to a bath, which was intentionally contaminated with a multimetal standard solution. The decomposition of hydrogen peroxide in the bath was monitored in situ by an optical analyzer. Adsorption of metals to wafers was analyzed by spinning cleaning solutions, containing metals and complexing agents, on wafers. Metal concentrations were measured by TXRF and GFAAS combined with VPD sample preparation. [References: 8]
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