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首页> 外文期刊>Physica Scripta: An International Journal for Experimental and Theoretical Physics >New high-power XeCl* laser pumped by pulse discharge and characteristics
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New high-power XeCl* laser pumped by pulse discharge and characteristics

机译：脉冲放电泵浦的新型大功率XeCl *激光器及其特性

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A new pumped system and design method of XeCl* laser is accomplished in order to be applied in the interaction between laser and material. material plasma study. and to prepare quartz film, semiconductor film. CMR film, optical etching. and other kinds of films. Not only does high power XeCl laser systems adopt ns discharge. spark gap. UV preionization. glow discharge, design of symmetrical electrode. but also electrode calculation. reducing, circuit inductance. laser resonator design are finished. The characteristics of the XeCl excimer laser are measured and analyzed. The wavelength is 308 run. The pulse width is IS us. The output energy of a pulse is 300 mJ. The maximal repetition frequency is 5 Hz. It is shown that. under real experimental conditions. the growth output power of the XeCl excimer laser depends on the gas pressure. a suitable composition of mixture gas is He : Xe : He = 0.1% : 1% : 98.9%. and the gain of higher discharged voltage Situation. The velocity equation of the kinetic model is tested by comparison with experimental data. A new high-power excimer laser is obtained with high energy. simple structure. high pump intensity. large activate volume. and stable performance. The laser action pushing the matter into extreme non-equilibrium leads to material ejection from the target. produces ablation. spilling eclosion. [References: 12]
机译：为了在激光与材料的相互作用中得到应用，完成了一种新的XeCl *激光器的泵浦系统和设计方法。材料等离子体研究。并准备石英膜，半导体膜。 CMR膜，光学蚀刻。和其他类型的电影。高功率XeCl激光系统不仅采用ns放电。火花间隙。紫外线预电离。辉光放电，对称电极设计。而且还有电极计算。降低电路电感。激光谐振器设计完成。测量并分析了XeCl准分子激光器的特性。波长为308nm。脉冲宽度为IS us。脉冲的输出能量为300 mJ。最大重复频率为5 Hz。如图所示。在真实的实验条件下XeCl准分子激光器的增长输出功率取决于气压。混合气体的合适组成是He：Xe：He ＝ 0.1％：1％：98.9％。并获得更高的放电电压情况。通过与实验数据比较，测试了动力学模型的速度方程。获得了具有高能量的新型大功率准分子激光器。结构简单。高泵浦强度。激活量大。性能稳定。激光作用将物质推至极度不平衡状态，导致材料从目标中弹出。产生消融。溢出的外壳。 [参考：12]

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