DLTS study of nucleation stage of oxygen precipitate in silicon

Antonova IV.; Shaimeev SS.; Popov VP.

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DLTS study of nucleation stage of oxygen precipitate in silicon

机译：DLTS研究硅中氧沉淀的成核阶段

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Oxygen precipitate formation at 600-700 degrees C was studied by a new method based on DLTS data analysis. OP formation goes on through the creation of oxygen-rich local areas in the silicon matrix. The accumulation of oxygen atoms in these areas with annealing time leads to the phase transformation starting with some critical oxygen concentration. OP nuclei has a friable structure with a high surface-to-volume ratio. (C) 1998 Elsevier Science B.V. All rights reserved. [References: 23]

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《Physica, B. Condensed Matter》 |1998年第2期|共8页
作者
Antonova IV.; Shaimeev SS.; Popov VP.;
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正文语种 eng
中图分类物理学;
关键词
Silicon; Oxygen precipitates; Nucleation;

机译：硅;氧沉淀;成核;

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专利

1. DLTS study of nucleation stage of oxygen precipitate in silicon [J] . Antonova IV., Shaimeev SS., Popov VP. Physica, B. Condensed Matter . 1998,第1a2期

机译：DLTS研究硅中氧沉淀的成核阶段
2. Oxygen precipitate precursors and low temperature gettering processes. II. DLTS analysis of deep levels associated to oxide precipitates [J] . E. Yakimov, D. Feklisova, A. Castaldini, Materials science in semiconductor processing . 1999,第1期

机译：氧气会沉淀前体和低温吸气过程。二。 DLTS分析与氧化物沉淀有关的深层
3. High temperature nucleation of oxygen precipitates in Germanium-doped Czochralski silicon [J] . Jiahe Chen, Xiangyang Ma, Deren Yang Thin Solid Films . 2010,第9期

机译：掺锗的切克劳斯基硅中氧沉淀物的高温成核
4. DLTS STUDY OF OXYGEN PRECIPITATES EVOLUTION IN CZGCHRALSKI GROWN SILICON AT HIGH PRESSURE - HIGH TEMPERATURE [C] . I. V. Antonova, L. I. Fedina, A. Misiuk, Conference on Applied Crystallography . 1995

机译：高压 - 高温下Czgchralski生长硅的氧气沉淀的DLTS研究
5. The nucleation and growth of copper nanoclusters on silicon surfaces from deoxygenated ultra pure water solutions. [D] . Singh, Andy. 2004

机译：脱氧的超纯水溶液在硅表面形成铜纳米团簇并成核并生长。
6. A Comparative Study of Secondary Structure and Interactions of the R5 Peptide in Silicon Oxide and Titanium Oxide Co-precipitates using Solid-state NMR Spectroscopy [O] . Erika L. Buckle, Adrienne Roehrich, Branden Vandermoon, -1

机译：使用固态NMR光谱比较氧化硅和氧化钛共沉淀物中R5肽的二级结构和相互作用的比较
7. The Role of Carbon in Nucleation of Oxygen Precipitates in CZ Silicon Crystals [O] . Y. Shimanuki, H. Furuya, I. Suzuki 2016

机译：碳在CZ硅晶体中氧沉淀成核中的作用

DLTS study of nucleation stage of oxygen precipitate in silicon

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