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Surface Composition and Erosion Yields for CVD TiB sub 2 Films Subjected to Low Energy Deuterium Ion Bombardment

机译：CVD TiB sub 2薄膜在低能氘离子轰击下的表面组成和侵蚀产率

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The surface composition and low energy sputter yield of deuterium bombarded CVD TiB sub 2 films have been measured. The sputter yield increases with energy up to 1 keV where it reaches a maximum of 0.024 atoms/ion. Above 1 keV the yield decreases due to ion penetration effects. Surface composition measurements using Auger, x-ray photoelectron and secondary ion mass spectroscopies show that a surface layer about 200 A thick is depleted in B during 2 keV deuterium bombardment. This effect is attributed to preferential sputtering. Oxides and deuterides of titanium are also observed on the deuterium bombardment TiB sub 2 surface. (ERA citation 05:020917)

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作者
Nelson, G. C.; Borders, J. A.;
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年度 1980
页码 p.1-14
总页数 14
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Titanium borides; Chemical vapor deposition; Deuterium; Erosion; Films; Graphite; Ions; Physical radiation effects; Substrates; Surface properties;

机译：硼化钛;化学气相沉积;氘;侵蚀;薄膜;石墨;离子;物理辐射效应;基材;表面性质;

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1. Investigation of change of the composition and structure of the CaF_2/Si films surface at the low-energy bombardment [J] . B.E. Umirzakov, D.A. Tashmukhamedova, M.K. Ruzibaeva, Nuclear instruments and methods in physics research . 2014,第maya1期

机译：低能轰击下CaF_2 / Si薄膜表面组成和结构变化的研究
2. Effect of the surface temperature on surface morphology, deuterium retention and erosion of EUROFER steel exposed to low-energy, high-flux deuterium plasma [J] . M. Balden, S. Elgeti, M. Zibrov, Nuclear Materials and Energy . 2017,第5期

机译：表面温度对暴露于低能高通量氘等离子体下的EUROFER钢的表面形态，氘保留和腐蚀的影响
3. Low energy sputter yields for diamond, carbon-carbon composite, and molybdenum subject to xenon ion bombardment [J] . J.J.Blandino, D.G.Goodwin Diamond and Related Materials . 2000,第12期

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4. Influence of Low Ion Bombardment Energy on Interface Formation and Thin Film Growth in a Plasma-CVD Environment [C] . A. Amassian, P. Desjardins, L. Martinu Society of Vacuum Coaters Annual Technical Conference; 20050423-28; Denver,CO(US) . 2005

机译：低离子轰击能量对等离子体CVD环境中界面形成和薄膜生长的影响
5. Studies of low energy ion bombardment of cubic boron nitride (111) surfaces by reflection electron energy loss spectroscopy. [D] . Hui, Yuen Yung. 2003

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6. Sputtering Yields for C60 and Au3 Bombardment of Water Ice as a Function of Incident Kinetic Energy [O] . Michael F. Russo Jr., Christopher Szakal, Joseph Kozole, -1

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7. Effect of the surface temperature on surface morphology, deuterium retention and erosion of EUROFER steel exposed to low-energy, high-flux deuterium plasma [O] . M. Balden, S. Elgeti, M. Zibrov, 2017

机译：表面温度对暴露于低能量，高通量氘等离子体的EUROFER钢表面形貌，氘保留和侵蚀的影响

Surface Composition and Erosion Yields for CVD TiB sub 2 Films Subjected to Low Energy Deuterium Ion Bombardment

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