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Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source

机译：微型电感耦合等离子体源的二维单元粒子蒙特卡罗模拟

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Two-dimensional axisymmetric particle-in-cell simulations with Monte Carlo collision calculations (PIC-MCC) have been conducted to investigate argon microplasma characteristics of a miniature inductively coupled plasma source with a 5-mm-diameter planar coil, where the radius and length are 5 mm and 6 mm, respectively. Coupling the rf-electromagnetic fields to the plasma is carried out based on a collisional model and a kinetic model. The former employs the cold-electron approximation and the latter incorporates warm-electron effects. The numerical analysis has been performed for pressures in the range 370–770 mTorr and at 450 MHz rf powers below 3.5 W, and then the PIC-MCC results are compared with available experimental data and fluid simulation results. The results show that a considerably thick sheath structure can be seen compared with the plasma reactor size and the electron energy distribution is non-Maxwellian over the entire plasma region. As a result, the distribution of the electron temperature is quite different from that obtained in the fluid model. The electron temperature as a function of rf power is in a reasonable agreement with experimental data. The pressure dependence of the plasma density shows different tendency between the collisional and kinetic model, implying noncollisional effects even at high pressures due to the high rf frequency, where the electron collision frequency is less than the rf driving frequency.
机译：已经进行了带有蒙特卡洛碰撞计算（PIC-MCC）的二维轴对称单元内粒子模拟，以研究直径为5毫米的平面线圈的微型电感耦合等离子体源的氩微等离子体特性，其中半径和长度分别是5毫米和6毫米。射频电磁场与等离子体的耦合是基于碰撞模型和动力学模型进行的。前者采用冷电子近似，而后者则采用温电子效应。已对压力在370–770 mTorr范围内和450 W rf功率低于3.5 W的压力进行了数值分析，然后将PIC-MCC结果与可用的实验数据和流体模拟结果进行了比较。结果表明，与等离子体反应器的尺寸相比，可以看到相当厚的鞘结构，并且电子能量在整个等离子体区域上的分布都不是麦克斯韦。结果，电子温度的分布与流体模型中获得的温度有很大不同。电子温度随射频功率的变化与实验数据基本吻合。等离子体密度与压力的关系在碰撞模型和动力学模型之间显示出不同的趋势，这意味着即使在高碰撞频率小于rf驱动频率的高rf频率下，即使在高压下也具有非碰撞效应。

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