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A set of vacuum pumps including a drag pump
A set of vacuum pumps including a drag pump
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机译:一组真空泵,包括一个牵引泵
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摘要
A drag pump for pumping gas and a set of vacuum pumps including the drag pump are disclosed. The drag pump comprises: a rotor configured to rotate within a stator component and to drive a gas to be pumped from a gas inlet to a gas outlet; magnetic bearings for rotatably mounting the rotor within the pump; wherein at least a portion of the rotor and stator component configured to contact the gas to be pumped are configured for operation at temperatures above 130° C.
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