NEGATIVE PHOTORESIST FOR SILICON KOH ETCH WITHOUT SILICON NITRIDE

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• 3. NEGATIVE PHOTORESIST FOR SILICON KOH ETCH WITHOUT SILICON NITRIDE [P] . 欧洲知识产权局专利： EP1932060A4 . 2010-06-23

  机译： 不含氮化硅的KOH蚀刻片的负光致抗蚀剂

• 4. Negative photoresist for silicon KOH etch without silicon nitride [P] . 美国专利： US7695890B2 . 2010-04-13

  机译： 不含氮化硅的用于KOH硅蚀刻的负性光刻胶

• 5. NEGATIVE PHOTORESIST FOR SILICON KOH ETCH WITHOUT SILICON NITRIDE [P] . SG140725A1 . 2008-04-28

  机译： 不含氮化硅的KOH蚀刻片的负光致抗蚀剂

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