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Method of manufacturing a MEMS resonator , oscillator and MEMS resonator ,
Method of manufacturing a MEMS resonator , oscillator and MEMS resonator ,
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机译：MEMS谐振器的制造方法，振荡器和MEMS谐振器，
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摘要
PROBLEM TO BE SOLVED: To provide a microelectromechanical system (MEMS) vibrator which has high reliability and stable vibration characteristics.;SOLUTION: A MEMS vibrator 100 comprises: a substrate 10; a first electrode 20 formed above the substrate 10; and a second electrode 30 including a support part 30a formed above the substrate 10 and a beam part 30b which is extended from the support part 30a and arranged facing the first electrode 20. The first electrode 20 includes a first side face 22a formed outside of the outer edge of the second electrode 30 in a plan view and a second side face 22b formed inside of the outer edge of the second electrode 30 in a plan view. The first side face 22a is tilted to a top face 10a of the substrate 10, and the second side face 22b and a top face 22c of the first electrode 20 constitute an angle part 23.;COPYRIGHT: (C)2012,JPO&INPIT
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