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APPARATUS FOR REVIEWING AND REPAIRING DEFECT OF LCD TFT PATTERNED GLASS
APPARATUS FOR REVIEWING AND REPAIRING DEFECT OF LCD TFT PATTERNED GLASS
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机译：用于检查和修复LCD TFT图案玻璃的缺陷的装置
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摘要
PURPOSE: An apparatus for discovering and repairing a defect of an LCD(Liquid Crystal Display) TFT(Thin Film Transistor) pattern glass is provided to repair a defect by discovering a defect within an LCD TFT pattern glass using a digital camera traveling in the XYZ axes and a laser and by irradiating a laser beam on the discovered defect. CONSTITUTION: A computer(25) inputs a location coordinate of a head unit(23) to a stage controller(27). The stage controller moves the head unit to the location coordinate. The computer photographs a defect within an LCD TFT pattern glass(10) with the camera(17) of the head unit. When the defect is discovered, the computer moves the head unit to the location of the defect and irradiates laser beam on the defect area by operation of a laser optical assembly(19). [Reference numerals] (10) LCD TFT pattern glass; (11) Gantry stage; (13) Chuck; (15) Z stage; (17) Camera; (19) Laser optics assembly; (21) Field illuminator; (27) Stage controller; (29,37) Field/back light illuminator driver; (30) Turret control unit; (31) Frame grabber; (33) Glass; (35) Backlight illuminator
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