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DEFECT MODIFYING METHOD OF GRAY TONE MASK, MANUFACTURING METHOD OF GRAY TONE MASK, AND GRAY TONE MASK
DEFECT MODIFYING METHOD OF GRAY TONE MASK, MANUFACTURING METHOD OF GRAY TONE MASK, AND GRAY TONE MASK
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机译：灰色调面膜的缺陷修饰方法，灰色调面膜的制造方法和灰色调面膜
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摘要
A defect modifying method of a gray tone mask, a manufacturing method of a gray tone mask, and a gray tone mask are provided to correct a defect generated from a semi-transparent part by forming a correcting layer in a layer forming area. A semi-transparent layer and a light shielding layer are formed on a transparent substrate(24). A semi-transparent part is formed by using the semi-transparent layer. A defect part is defined in the semi-transparent part when a defect is generated in the semi-transparent part. A layer forming unit and a layer forming material are determined to form a correcting layer(27a,27b) in the defect part. A layer forming area is determined by using the layer forming unit and the layer forming material. The correcting layer is formed in the determined layer forming area.
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