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METHOD FOR CORRECTING DEFECT OF GRAY TONE MASK, METHOD FOR MANUFACTURING GRAY TONE MASK, GRAY TONE MASK, AND METHOD FOR TRANSFERRING PATTERN

机译：校正灰色色调面膜的方法，制造灰色色调面膜，灰色色调面膜和转移图案的方法

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摘要

PPROBLEM TO BE SOLVED: To provide a method for correcting defects of a gray tone mask by which the defects caused in a semi-translucent part is suitably corrected. PSOLUTION: The present invention provides the method for correcting defects of the gray tone mask 20 having a light-shielding part 21, a translucent part 22, and a semi-translucent part 23 that reduces the quantity of exposure light to be used when the mask is used, by a predetermined quantity, wherein the semi-translucent part 23 is formed of a semi-translucent film 26. The method includes the steps of: specifying defective portions 51, 52 when a defect is caused in the semi-translucent part 23; removing the whole semi-translucent film 26 in the semi-translucent part 23 in a region including the defective portions 51, 52 and enclosed by other light-shielding part and/or semi-translucent part; and forming a semi-translucent correction film 27 of a material or a composition different from the above semi-translucent film 26 in the region 53 where the semi-translucent film 26 is removed. PCOPYRIGHT: (C)2009,JPO&INPIT

机译：

要解决的问题：提供一种用于校正灰色色调掩模的缺陷的方法，通过该方法可以适当地校正在半透明部分中引起的缺陷。

解决方案：本发明提供了用于校正具有减少了要使用的曝光光量的遮光部分21，半透明部分22和半透明部分23的灰度掩模20的缺陷的方法。当使用掩模时，以预定的量，其中半透明部分23由半透明膜26形成。该方法包括以下步骤：当在半透明膜中引起缺陷时，指定缺陷部分51、52。半透明部分23;在包括缺陷部分51、52并被另一遮光部分和/或半透明部分包围的区域中的半透明部分23中去除整个半透明膜26;在去除了半透明膜26的区域53中，形成与上述半透明膜26不同的材料或组成的半透明校正膜27。

版权：（C）2009，日本特许厅＆INPIT 展开▼

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公开/公告号JP2009014934A

专利类型
公开/公告日2009-01-22

原文格式PDF
申请/专利权人 HOYA CORP;HOYA ELECTRONICS KOREA CO LTD;
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申请/专利号JP20070175544
发明设计人 SANO MICHIAKI;SAKAMOTO YUJI;
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申请日2007-07-03
分类号G03F1/08;
国家 JP
入库时间 2022-08-21 19:42:28

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