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Film deposition apparatus of magnesium oxide, zinc oxide or zinc film forming method and magnesium oxide zinc film zinc oxide film (ZnO) or of (ZnMgO)
Film deposition apparatus of magnesium oxide, zinc oxide or zinc film forming method and magnesium oxide zinc film zinc oxide film (ZnO) or of (ZnMgO)
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机译：氧化镁的膜沉积设备，氧化锌或锌膜的形成方法以及氧化镁锌膜或氧化锌膜（ZnMgO）
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摘要
The present invention aims to provide a method for forming a zinc oxide film or a magnesium zinc oxide film having a high transmittance. Then, the method of forming the magnesium oxide, zinc oxide or a zinc layer according to the present invention, the step of misting the (4,8) solution containing magnesium or zinc (A) zinc, (B) a substrate (2) a step of heating, on a main surface of the first substrate (C) during heating, and a, a step of supplying the ozone solution is atomized.
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