Thin film defect inspection for standard board, a method of manufacturing the same, and thin film defect inspection method

• 1. 缺陷检查装置、缺陷检查方法、圆偏振板或椭圆偏振板的制造方法及相位差板的制造方法 [P] . 中国专利： CN109490323A . 2019-03-19
• 2. 缺陷检查用拍摄装置及系统、膜制造装置及制造方法、缺陷检查用拍摄方法、缺陷检查方法 [P] . 中国专利： CN107024482A . 2017-08-08
• 3. Method for constructing database for thin film defect inspection defect inspection method for thin film using the database and defect inspection apparatus for thin film including the database [P] . 韩国专利： KR20190059254A . 2019-05-30

  机译： 用于构造薄膜缺陷检查数据库的方法和使用该数据库的薄膜缺陷检查方法以及包括该数据库的薄膜缺陷检查装置

• 4. STANDARD SUBSTRATE FOR INSPECTING THIN-FILM DEFECT, MANUFACTURING METHOD THEREOF AND METHOD OF INSPECTING THIN-FILM DEFECT [P] . 日本专利： JP2009282087A . 2009-12-03

  机译： 检查薄膜缺陷的标准基材，其制造方法和检查薄膜缺陷的方法

• 5. THIN FILM DEFECT INSPECTION METHOD AND INSPECTION DEVICE THEREFOR [P] . 日本专利： JPH07301608A . 1995-11-14

  机译： 薄膜缺陷检查方法及其检查装置

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