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MANUFACTURING METHOD OF GALLIUM NITRIDE POWDER, AND NITRIDE-BASED LIGHT-EMITTING ELEMENT USING GALLIUM NITRIDE POWDER MANUFACTURED BY THE SAME
MANUFACTURING METHOD OF GALLIUM NITRIDE POWDER, AND NITRIDE-BASED LIGHT-EMITTING ELEMENT USING GALLIUM NITRIDE POWDER MANUFACTURED BY THE SAME
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机译:氮化镓粉的制造方法,以及使用相同制造的氮化镓粉的基于氮化物的发光元件
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摘要
PROBLEM TO BE SOLVED: To provide a simple and easy manufacturing method of GaN powder, and a nitride-based light-emitting element using GaN powder manufactured by the method.;SOLUTION: The manufacturing method of GaN powder according to the invention comprises the steps of: collecting GaN etching by-products produced in an etching step of a GaN-based light-emitting element; rinsing the GaN etching by-products thus collected; heating the GaN etching by-products subjected to the rinse, thereby removing an indium (In) component that the GaN etching by-products contain; and pulverizing the GaN etching by-products with the indium component removed therefrom to make powder thereof.;COPYRIGHT: (C)2012,JPO&INPIT
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