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EPITAXIAL GROWTH OF A HIGH QUALITY MAGNESIUM OXIDE FILM USING A CUBIC SILICON CARBIDE BUFFER LAYER ON A SILICON (100) SUBSTRATE
EPITAXIAL GROWTH OF A HIGH QUALITY MAGNESIUM OXIDE FILM USING A CUBIC SILICON CARBIDE BUFFER LAYER ON A SILICON (100) SUBSTRATE
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机译:使用硅质碳化硅缓冲层在硅(100)基质上的高质量氧化镁膜的表观生长
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摘要
A CVD method for growing MgO on a Si(100) substrate coated with a cubic SiC buffer layer provides a single-crystalline MgO film having improved quality.
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