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Multi-chip module testability using poled-polymer interlayer dielectrics

机译:使用极化聚合物夹层电介质的多芯片模块可测试性

摘要

The present invention improves multi-chip module (MCM) testability by using a new technique to detect on-substrate electric field strength. The invention employs a non-invasive, laser-based instrument to probe the MCM structures fabricated with poled polyimide interlayer dielectrics and thin film metallizations on silicon carriers. Circuit element characteristics of MCMs are probed with laser to detect electric field strength. The electrical, mechanical and optical properties of the electro-optical dielectric layers are determined to investigate the effect of the poling and processing operations on the efficacy of the polyimide as both a dielectric layer and an electro-optic material suitable for laser probing.
机译:本发明通过使用检测衬底上的电场强度的新技术来改善多芯片模块(MCM)的可测试性。本发明使用基于激光的非侵入性仪器来探测由极化的聚酰亚胺层间电介质和在硅载体上的薄膜金属化制成的MCM结构。用激光探测MCM的电路元件特性,以检测电场强度。确定电光介电层的电,机械和光学性能,以研究极化和加工操作对聚酰亚胺作为介电层和适用于激光探测的电光材料的功效的影响。

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