Modeling of MEMS capacitive differential pressure sensor

机译：MEMS电容压差传感器的建模

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In this paper, modeling of high sensitive capacitive differential pressure sensor (CDPS) structure was proposed. The-working principle of CDPS was explained. Different types of CDPS structure for aircraft altimeter were designed. Polymide square diaphragm membrane is used to sense the pressure. Simulation was carried out for the range of pressure from 116 mbar to 1100 mbar, which is equivalent to aircraft flying altitude. Analysis was done with simulation results for centre deflection sensitivity and capacitive sensitivity for different models of CDPS structure. From the simulated results an improved CDPS models with bossed diaphragm membrane shows linear characteristics. The deflection sensitivity and capacitive sensitivity are 10.912nm/mbar and 3.025fF/mbar respectively.

机译：本文提出了一种高灵敏度电容式差压传感器（CDPS）结构的建模方法。解释了CDPS的工作原理。设计了用于飞机高度计的不同类型的CDPS结构。聚酰胺方形隔膜膜用于感测压力。对压力范围从116 mbar到1100 mbar的模拟进行了模拟，这相当于飞机的飞行高度。通过仿真结果对不同模型的CDPS结构的中心偏转灵敏度和电容灵敏度进行了分析。从模拟结果可以看出，改进的带有凸台隔膜的CDPS模型具有线性特征。偏转灵敏度和电容灵敏度分别为10.912nm / mbar和3.025fF / mbar。

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来源
《2013 International Conference on Circuits, Power and Computing Technologies》|2013年|699-702|共4页
会议地点 Nagercoil(IN)
作者
Eswaran Parthasarathy; Malarvizhi S.;
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作者单位

Department of Electronics and Communication Engineering, SRM University, Kattankulathur, Kancheepuram Dt.-603203, Tamil Nadu, Indiac;

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会议组织
原文格式 PDF
正文语种 eng
中图分类
关键词
Capacitive differential pressure sensor (CDPS); Deflection sensitivity; MEMS CDPS; Modeling of CDPS; Polymide diaphragm modeling; capacitive sensitivity;

机译：电容差压传感器（CDPS）;偏转灵敏度; MEMS CDPS; CDPS建模;聚酰亚胺隔膜建模;电容灵敏度;;

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2. Modeling and Analysis of High Sensitive MEMS Capacitive Differential Pressure Sensor with Polymide Diaphragm [J] . P. Eswaran, S. Malarvizhi Advanced Science Letters . 2013,第12期

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Modeling of MEMS capacitive differential pressure sensor

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