MIM serie capacitor model for MMIC design application

机译：适用于MMIC设计应用的MIM系列电容器模型

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摘要

A new proposed Metal-Insulator-Metal (MIM) serie capacitor model for Monolithic Microwave Integrated Circuit is presented. The MIM serie capacitor model covers the frequency range up to 40 GHz for millimeter-wave circuit design application. The parasitic elements of model are extracted by parameters fitting optimization between the measured S-parameters and model simulated result. The relationship between the optimized parasitic element values and the dimension data of capacitor structure can be expressed.

机译：提出了一种新的单片微波集成电路金属-绝缘-金属（MIM）系列电容器模型。 MIM系列电容器模型涵盖了毫米波电路设计应用中高达40 GHz的频率范围。通过测量的S参数和模型仿真结果之间的参数拟合优化来提取模型的寄生元素。可以表示优化的寄生元件值与电容器结构的尺寸数据之间的关系。

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来源
《2013 International Workshop on Microwave and Millimeter Wave Circuits and System Technology》|2013年|475-478|共4页
会议地点 Emeishan(CN)
作者
Tiwat Pongthavornkamol; Yuan Tingting; Liu Guoguo; Chen Xiaojuan;
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作者单位

Institute of Microelectronics, University of Chinese Academy of Sciences, Beijing 100029, Chinac;

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会议组织
原文格式 PDF
正文语种 eng
中图分类
关键词
MIM Capacitor; MMIC; PECVD; RF-Power amplifiers;

机译：MIM电容器; MMIC; PECVD; RF功率放大器;;

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专利

1. Low temperature high density Si_3N_4 MIM capacitor technology for MMMIC and RF-MEMs applications [J] . K. Elgaid, H. Zhou, C.D.W. Wilkinson, Microelectronic Engineering . 2004,第Jun期

机译：适用于MMMIC和RF-MEMs应用的低温高密度Si_3N_4 MIM电容器技术
2. DC and RF characteristics of advanced MIM capacitors for MMIC's using ultra-thin remote-PECVD Si/sub 3/N/sub 4/ dielectric layers [J] . Jae-Hak Lee, Dae-Hyun Kim IEEE Microwave and Guided Wave Letters . 1999,第9期

机译：使用超薄远程PECVD Si / sub 3 / N / sub 4 /介电层的MMIC的高级MIM电容器的DC和RF特性
3. Simple Wide-Band Metal-Insulator-Metal (MIM) Capacitor Model for RF Applications and Effect of Substrate Grounded Shields [J] . Seong-Sik SONG, Seung-Wook LEE, Joonho GIL, Japanese Journal of Applied Physics. Part 2, Letters . 2004,第4BPt1期

机译：用于射频应用的简单宽带金属绝缘体金属（MIM）电容器模型和基板接地屏蔽的影响
4. MIM serie capacitor model for MMIC design application [C] . Tiwat Pongthavornkamol, Yuan Tingting, Liu Guoguo, International Workshop on Microwave and Millimeter Wave Circuits and System Technology . 2013

机译：MIM Serie电容器模型MMIC设计应用
5. A model-order-reduction approach to metal-insulator-metal (MIM) capacitors of significant electrical length. [D] . Asahara, Masaho. 2006

机译：具有明显电气长度的金属-绝缘体-金属（MIM）电容器的模型级简化方法。
6. An Improved Large Signal Model for 0.1 μm AlGaN/GaN High Electron Mobility Transistors (HEMTs) Process and Its Applications in Practical Monolithic Microwave Integrated Circuit (MMIC) Design in W band [O] . Junfeng Li, Shuman Mao, Yuehang Xu, 2018

机译：0.1μmAlGaN / GaN高电子迁移率晶体管（HEMT）工艺的改进大信号模型及其在W波段实用单片微波集成电路（MMIC）设计中的应用
7. MIM CAPACITOR SIMPLE SCALABLE MODEL DETERMINATION FOR MMIC APPLICATION ON GaAs [O] . Lei Wang, Rui-Min Xu, Bo Yan 2006

机译：MIM电容器在GaAs上MMIC应用的简单可扩展模型确定

MIM serie capacitor model for MMIC design application

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