FABRICATION OF THICK Pb(Zr_x,Ti_(1-x))O_3 (PZT) FILM BY ELECTROISTATIC SPRAY DEPOSITION

机译：静电喷涂沉积制备厚Pb（Zr_x，Ti_（1-x））O_3（PZT）膜

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Strong pervoskite (100) oriented PZT thick films were prepared by a new-deposition method, named "electrostatic spray deposition (ESD)", using sol-gel solution as precursor. The electric properties of the film are comparable with that of the film prepared by sol-gel method, which makes it possible to apply ESD to MEMS technology for the fabrication of powerful microactuators.

机译：以溶胶-凝胶溶液为前体，通过一种称为“静电喷涂（ESD）”的新沉积方法，制备了坚固的坡方石（100）取向的PZT厚膜。该膜的电性能与通过溶胶-凝胶法制备的膜的电性能相当，这使得可以将ESD应用于MEMS技术以制造强大的微致动器。

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来源
《3rd International Workshop on Microfactories Sep 16-18, 2002 Minneapolis, Minnesota USA》|2002年|p.125-128|共4页
会议地点 Minneapolies MN(US);Minneapolies MN(US)
作者
Jiaru Chu; Jian Lu; Wenhao Huang; Zhiming Ping;
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作者单位

Dept. of Preci. Mach. and Instrum., Univ. of Sci. and Tech. of China, Hefei, Anhui 230027, China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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4. FABRICATION OF THICK Pb(Zr_x,Ti_(1-x))O_3 (PZT) FILM BY ELECTROISTATIC SPRAY DEPOSITION [C] . Jiaru Chu, Jian Lu, Wenhao Huang, International workshop on microfactories . 2002

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FABRICATION OF THICK Pb(Zr_x,Ti_(1-x))O_3 (PZT) FILM BY ELECTROISTATIC SPRAY DEPOSITION

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