FABRICATION OF THICK Pb(Zr_x,Ti_(1-x))O_3 (PZT) FILM BY ELECTROISTATIC SPRAY DEPOSITION

机译：通过电磁喷涂沉积制造厚PB（Zr_x，Ti_（1-X））O_3（PZT）膜的膜

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Strong pervoskite (100) oriented PZT thick films were prepared by a new-deposition method, named "electrostatic spray deposition (ESD)", using sol-gel solution as precursor. The electric properties of the film are comparable with that of the film prepared by sol-gel method, which makes it possible to apply ESD to MEMS technology for the fabrication of powerful microactuators.

机译：通过使用溶胶 - 凝胶溶液作为前体，通过新沉积法制备“静电喷雾沉积（ESD）”的新沉积方法制备了强的Perovoskite（100）的PZT厚膜。薄膜的电性能与溶胶 - 凝胶法制备的薄膜相当，这使得可以将ESD施加到MEMS技术中用于制造强大的微致动器。

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《International workshop on microfactories》|2002年||共4页
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Jiaru Chu; Jian Lu; Wenhao Huang; Zhiming Ping;
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中图分类真空电子技术;
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FABRICATION OF THICK Pb(Zr_x,Ti_(1-x))O_3 (PZT) FILM BY ELECTROISTATIC SPRAY DEPOSITION

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