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Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication

机译：用于制造光子晶体LED的具有六边形图案的大尺寸掩模的全息技术

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A simple optical system for generating large-size hexagonal lattice used as the mask for photonic crystal LED fabrication is proposed. The key element in the system is a holographic diffractive optical element consisting of three phase gratings made with holographic means. Under the illumination of a single plane wave, three plane waves can be generated and interfere to form a uniform hexagonal pattern. Theoretical analysis demonstrates that equal intensity of the three plane waves can be obtained if groove depth of the gratings is about 400 nm, which can be achieved by controlling the development time in grating processing. Mask on LED with lattice area up to 15 cm~2 has been obtained with the method.

机译：提出了一种简单的光学系统，用于生成用作光子晶体LED制造的掩模的大尺寸六边形晶格。该系统中的关键元件是全息衍射光学元件，其由用全息装置制成的三相光栅组成。在单个平面波的照射下，可以产生三个平面波并干涉形成均匀的六边形图案。理论分析表明，如果光栅的凹槽深度约为400 nm，则可以得到三个平面波的强度相等，这可以通过控制光栅加工中的显影时间来实现。该方法获得了在LED上的晶格面积最大为15 cm〜2的掩模。

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来源
《Advanced LEDs for Solid State Lighting》|2006年|P.63550X.1-63550X.8|共8页
会议地点 Gwangju(KR)
作者
Ying Liu; Xiangsu Zhang; Shou Liu;
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作者单位

Department of Physics, Xiamen University, Xiamen 361005, China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类电气照明;
关键词
large-size photonic crystal; hexagonal lattice; holographic diffractive optical element; photonic crystal LED; mask;

机译：大尺寸光子晶体六方晶格全息衍射光学元件光子晶体LED掩模;

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专利

1. Proposed single-exposure holographic fabrication of microsphere-type photonic crystals through phase-mask techniques [J] . Y. Lin, P. R. Herman, E. L. Abolghasemi Journal of Applied Physics . 2005,第9期

机译：通过相掩膜技术提议的微球型光子晶体的单曝光全息照相制造
2. Design and holographic fabrication of tetragonal and cubic photonic crystals with phase mask: toward the mass-production of three-dimensional photonic crystals [J] . Y. Lin, P. R. Herman, K. Darmawikarta Applied Physics Letters . 2005,第7期

机译：具有相掩膜的四方和立方光子晶体的设计和全息制造：向三维光子晶体的批量生产迈进
3. Fabrication of large-size photonic crystals by holographic lithography using a lens array [J] . Bing Liang, Yikun Liu, Juntao Li, Journal of Micromechanics and Microengineering . 2012,第3期

机译：使用透镜阵列通过全息光刻法制造大尺寸光子晶体
4. Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication [C] . Ying Liu, Xiangsu Zhang, Shou Liu Advanced LEDs for Solid State Lighting . 2006

机译：用于制造光子晶体LED的具有六边形图案的大尺寸掩模的全息技术
5. Laser holographic fabrication of three-dimensional photonic crystal templates using advanced phase mask techniques [D] . Xu, Di 2010

机译：使用先进的相位掩膜技术对三维光子晶体模板进行激光全息制造
6. Holographic Fabrication of Designed Functional Defect Lines in Photonic Crystal Lattice Using a Spatial Light Modulator [O] . Jeffrey Lutkenhaus, David Lowell, David George, 2016

机译：使用空间光调制器在光子晶体晶格中设计功能缺陷线的全息制作。
7. Laser Holographic Fabrication of Three-Dimensional Photonic Crystal Templates Using Advanced Phase Mask Techniques [O] . Xu Di 2011

机译：使用先进的相位掩膜技术对三维光子晶体模板进行激光全息制作
8. Photonic Crystal Fabrication in Lithium Nobate via Pattern Transfer Through Wet and Dry Etched Chromium Mask. [R] . Yavuzcetin, O., Novikov, H. P., Dally, R. L., 2012

机译：通过湿法和干法蚀刻铬掩模进行图案转移制备锂铌酸盐中的光子晶体。

Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication

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